Patents by Inventor Thomas A. STUBBLEBINE

Thomas A. STUBBLEBINE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Autoconfiguration of hardware components of various modules of a substrate processing tool
    Patent number: 12073224
    Abstract: A substrate processing system comprises a module to perform an operation associated with processing a semiconductor substrate in the substrate processing system. The module includes a component used with the processing of the semiconductor substrate, and a file stored in the module. The file includes information about the component of the module. The substrate processing system comprises a controller to communicate with the module via a network of the substrate processing system. The controller receives the file from the module via the network, reads the information about the component from the received file, and maps, based on the information read from the received file, the component of the module to an option in an application used to configure the module. The controller automatically configures the component of the module using the option in the application to which the component of the module is mapped.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: August 27, 2024
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Bridget Hill, Scott Baldwin, Thomas A. Stubblebine, Rainer Unterguggenberger, Raymond Chau
  • AUTOCONFIGURATION OF HARDWARE COMPONENTS OF VARIOUS MODULES OF A SUBSTRATE PROCESSING TOOL
    Publication number: 20230030233
    Abstract: A substrate processing system comprises a module to perform an operation associated with processing a semiconductor substrate in the substrate processing system. The module includes a component used with the processing of the semiconductor substrate, and a file stored in the module. The file includes information about the component of the module. The substrate processing system comprises a controller to communicate with the module via a network of the substrate processing system. The controller receives the file from the module via the network, reads the information about the component from the received file, and maps, based on the information read from the received file, the component of the module to an option in an application used to configure the module. The controller automatically configures the component of the module using the option in the application to which the component of the module is mapped.
    Type: Application
    Filed: November 13, 2020
    Publication date: February 2, 2023
    Inventors: Bridget HILL, Scott BALDWIN, Thomas A. STUBBLEBINE, Rainer UNTERGUGGENBERGER, Raymond CHAU