Abstract: An analysis of the defects of a structured component includes a check of a local deviation between an actual structure dimension of the component and a target structure dimension of the component. In this context, the local deviation is checked at a location of a test path along a deviation coordinate which extends across the test path. The test is repeated at a plurality of different test path locations within a test region of the test path. A summed local deviation between the actual structure dimension and the target structure dimension over the test region is determined. The local deviation is compared with a local deviation tolerance value. The summed local deviation is compared with a summation deviation tolerance value. This results in a defect analysis with enhanced significance, which is implementable using a metrology system in particular.

Abstract: The invention relates to an inspection device for masks for semiconductor lithography, comprising an imaging device for imaging a mask, and an image recording device, wherein one or more correction bodies which exhibit a dispersive behavior for at least one subrange of the illumination radiation used for the imaging are arranged in the light path between the mask and the image recording device. The invention furthermore relates to a method for taking account of longitudinal chromatic aberrations in inspection devices for masks, comprising the following steps: recording a specific number of images having differently defocused positions, and selecting a subset of the images and simulating a longitudinal chromatic aberration of a projection exposure apparatus.

Abstract: The invention relates to an inspection device for masks for semiconductor lithography, comprising an imaging device for imaging a mask, and an image recording device, wherein one or more correction bodies which exhibit a dispersive behavior for at least one subrange of the illumination radiation used for the imaging are arranged in the light path between the mask and the image recording device. The invention furthermore relates to a method for taking account of longitudinal chromatic aberrations in inspection devices for masks, comprising the following steps: recording a specific number of images having differently defocused positions, and selecting a subset of the images and simulating a longitudinal chromatic aberration of a projection exposure apparatus.

Abstract: The invention relates to an inspection device for masks for semiconductor lithography, comprising an imaging device for imaging a mask, and an image recording device, wherein one or more correction bodies which exhibit a dispersive behavior for at least one subrange of the illumination radiation used for the imaging are arranged in the light path between the mask and the image recording device. The invention furthermore relates to a method for taking account of longitudinal chromatic aberrations in inspection devices for masks, comprising the following steps: recording a specific number of images having differently defocused positions, and selecting a subset of the images and simulating a longitudinal chromatic aberration of a projection exposure apparatus.

Abstract: The invention relates to an inspection device for masks for semiconductor lithography, comprising an imaging device for imaging a mask, and an image recording device, wherein one or more correction bodies which exhibit a dispersive behavior for at least one subrange of the illumination radiation used for the imaging are arranged in the light path between the mask and the image recording device. The invention furthermore relates to a method for taking account of longitudinal chromatic aberrations in inspection devices for masks, comprising the following steps: recording a specific number of images having differently defocused positions, and selecting a subset of the images and simulating a longitudinal chromatic aberration of a projection exposure apparatus.

Abstract: A car-carrying trailer having hydraulic cylinders for moving ramps has a single movable manually activated control unit and a single transmission link coupled to the control for controlling substantially all of the cylinders within the trailer. Data is received from the control unit and processed to determine the position of the ramps within the trailer and to produce control signals. Hydraulic cylinders move the ramps in accordance with the control signals. Position sensors transmit feedback to the processor and permit automatic termination of movement of the ramps to prevent damage to the cars. A vehicle is loaded onto the trailer and ramps within the trailer are adjusted until optimum ramp positions are obtained. Further in accordance with the invention sequence number is associated with the optimum ramp positions and the ramp positions are saved in a memory. At a later time, when the vehicle is to be loaded again, a sequence of ramp positions may be accessed.

Abstract: Method for manufacturing a electrohydraulic valve, a solenoid operated valve assembly, formed of a ferromagnetic end stop section and body section, an orifice section and a sleeve section of low magnetically permeable material. The sleeve section has an inner chamber with a centrally disposed portion of reduced diameter. Each of the sections is completely finished before assembly so that no further finishing operations are required. Predetermined sections are selected and a valve assembly is assembled by threading one end of the sleeve section to the end stop section and the other end to the body section. The orifice section is threaded to the body section to form a completed valve assembly.

Abstract: A single stage solenoid operated valve assembly of the cartridge type having a reversing flow orifice assembly with a side port, bottom port and an orifice. A poppet is adapted to seat in and close the orifice for controlling fluid flow between the side and bottom ports. A transverse flow passage provides fluid communication between the side port and the orifice and a pair of longitudinal flow passages provide fluid communication between the bottom port and a chamber above the poppet. An axis normal to the longitudinal axis of both longitudinal flow passages is also normal to the axis of the transverse flow passage. In this way pressure over the poppet is provided when fluid pressure is applied to the bottom port and pressure under the poppet is provided when fluid pressure is applied to the side port.

Abstract: A proportional follower spool valve system having a main spool slidable between end chambers maintained at substantially return pressure. First fluid connections are controlled by the main spool and they are effective to control output fluid flow in accordance with the position of the main spool. A pilot spool is slidable within an inner passage of the main spool. A first and a second driving chamber is formed by the main spool each having a driving area substantially less than the largest cross-sectional solid area of the main spool. Second fluid connections are controlled by the pilot spool for admitting fluid under pressure (1) to the first chamber when the pilot spool moves in a first direction away from the first chamber and (2) to the second chamber when the pilot spool moves in a second direction away from the second chamber. Each of the first and second driving chambers are disposed between a respective end chamber and a passage for return pressure.

Abstract: A solenoid having a high degree of proportionality. A stationary pole is disposed within an electromagnetic coil and forms part of a flux path. An armature slides into and out of a bore of the pole and forms another part of the flux path. The armature has walls which define an axial recess formed in the armature face adjacent the pole. The armature walls have a cross-sectional thickness which decreases in a direction toward the bore. The walls of the pole bore have a cross-sectional thickness which decreases in a direction toward the armature. An air gap is formed between the decreasing thickness pole bore walls and armature walls which air gap remains substantially constant in the radial dimension as the armature slides.

Abstract: A solenoid operated valve assembly formed of a ferromagnetic end stop section and body section, an orifice section and a sleeve section of low magnetically permeable material. The sleeve section has an inner chamber with a centrally disposed portion of reduced diameter. Each of the sections is completely finished before assembly so that no further finishing operations are required. Predetermined sections are selected and a valve assembly is assembled by threading one end of the sleeve section to the end stop section and the other end to the body section. The orifice section is threaded to the body section to form a completed valve assembly.

Abstract: A reel speed valve assembly for controlling the speed of a combine reel including a double acting compensator valve, a proportional controller valve, a relief valve, a load sense valve, and a manually adjustable controller valve may be operated as either a closed or open center valve and may be located at any position in a stack with minimal adjustment to manufacturing procedures.