Abstract: A method of manufacturing an array of nanoclusters and a substrate with an ordered array of nanoclusters. In a preferred embodiment of the invention, nanoclusters may be fabricated by depositing adatoms upon a surface containing an array of etched nanoscale wells, wherein the etched nanoscale wells are produced by etching a surface patterned by a mask containing a regular array of nanoscale pores. More preferably, nanoclusters may be fabricated by depositing adatoms upon a surface containing an array of etched nanoscale wells; wherein, the etched nanoscale wells are produced by low damage etching of a surface patterned by a crystalline mask of biological origin containing a regular array of nanoscale pores. A still further embodiment of the invention is a substrate including an ordered array of nanoclusters.

Abstract: A method of manufacturing an array of nanostuctures, such as quantum dots, having a controlled diameter and a substrate with an ordered array of nanostructures having a controlled diameter. In a preferred embodiment of the invention, nanoscale features are produced on a substrate by using a porous crystalline protein as a template for preparing an etch/deposition mask having a regular array of nanoscale pores of a diameter different from the protein template. The mask may be used to etch a regular array of nanoscale wells and/or deposit nanoclusters of adatoms on the surface of an underlying substrate. A further embodiment of the invention is a substrate including an ordered array of nanoscale features having a controlled size.

Abstract: A method for using intermediate transfer layers for transferring nanoscale patterns to substrates and forming nanostructures on substrates. An intermediate transfer layer is applied to a substrate surface, and one or more mask templates are then applied to the intermediate transfer layer. Holes are etched through the intermediate transfer layer, and material may be deposited into the etched holes.

Abstract: A method for using intermediate transfer layers for transferring nanoscale patterns to substrates and forming nanostructures on substrates. An intermediate transfer layer is applied to a substrate surface, and one or more mask templates are then applied to the intermediate transfer layer. Holes are etched through the intermediate transfer layer, and material may be deposited into the etched holes.