Patents by Inventor Thomas Anthony Case
Thomas Anthony Case has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11817231Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.Type: GrantFiled: August 16, 2021Date of Patent: November 14, 2023Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.Inventors: Johannes Ruoff, Juan Atkinson Mora, Thomas Anthony Case, Heiko Feldmann, Christoph Hilmar Graf Vom Hagen, Thomas Matthew Gregorich, Gerhard Krampert
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Publication number: 20230046280Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the light source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.Type: ApplicationFiled: August 16, 2021Publication date: February 16, 2023Inventors: Johannes Ruoff, Juan Atkinson Mora, Thomas Anthony Case, Heiko Feldmann, Christoph Hilmar Graf Vom Hagen, Thomas Matthew Gregorich, Gerhard Krampert
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Publication number: 20210407127Abstract: A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.Type: ApplicationFiled: September 9, 2021Publication date: December 30, 2021Inventors: Thomas Anthony Case, Susan Candell, Naomi Kotwal, Allen Gu, Lorenz Lechner, Wayne Broderick
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Publication number: 20210404977Abstract: A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.Type: ApplicationFiled: September 9, 2021Publication date: December 30, 2021Inventors: Thomas Anthony Case, Susan Candell, Naomi Kotwal, Allen Gu, Zheren Wu, Wayne Broderick
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Patent number: 10838191Abstract: A method of operating a microscope comprises recording a first image I1h of a sample, wherein the first image contains a first feature F1; recording a second image I2h of the sample, wherein the second image contains a second feature F2 arranged at a distance from the first feature; displacing the sample relative to the microscope by a displacement ; recording a third image I3h of the sample, wherein the third image contains the second feature; recording a fourth image I4h of the sample, wherein the fourth image contains a third feature F3 arranged at a distance from the second feature; and determining a position of the third feature relative to the first feature based on the first, second, third and fourth images.Type: GrantFiled: December 15, 2017Date of Patent: November 17, 2020Assignee: Carl Zeiss Microscopy GmbHInventors: Susan Candell, Thomas Anthony Case, Lorenz Lechner
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Patent number: 10782516Abstract: A method of operating a microscope comprises recording a first image I1h of a sample, wherein the first image contains a first feature F1; recording a second image I2h of the sample, wherein the second image contains a second feature F2 arranged at a distance from the first feature; displacing the sample relative to the microscope by a displacement ; recording a third image I3h of the sample, wherein the third image contains the second feature; recording a fourth image I4h of the sample, wherein the fourth image contains a third feature F3 arranged at a distance from the second feature; and determining a position of the third feature relative to the first feature based on the first, second, third and fourth images.Type: GrantFiled: December 15, 2017Date of Patent: September 22, 2020Assignee: Carl Zeiss Microscopy GmbHInventors: Susan Candell, Thomas Anthony Case, Lorenz Lechner
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Publication number: 20180172973Abstract: A method of operating a microscope comprises recording a first image I1h of a sample, wherein the first image contains a first feature F1; recording a second image I2h of the sample, wherein the second image contains a second feature F2 arranged at a distance from the first feature; displacing the sample relative to the microscope by a displacement ; recording a third image I3h of the sample, wherein the third image contains the second feature; recording a fourth image I4h of the sample, wherein the fourth image contains a third feature F3 arranged at a distance from the second feature; and determining a position of the third feature relative to the first feature based on the first, second, third and fourth images.Type: ApplicationFiled: December 15, 2017Publication date: June 21, 2018Inventors: Susan Candell, Thomas Anthony Case, Lorenz Lechner
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Patent number: 9142382Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.Type: GrantFiled: November 18, 2011Date of Patent: September 22, 2015Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
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Patent number: 8995622Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In response to receiving the beam of focused electrons, the target provides a transmission source of x-rays. Moreover, a repositioning mechanism selectively repositions the beam of focused electrons to different locations on a surface of the target based on a feedback parameter associated with operation of the x-ray source. This feedback parameter may be based on: an intensity of the x-rays output by the x-ray source; a position of the x-rays output by the x-ray source; an elapsed time during operation of the x-ray source; a cross-sectional shape of the x-rays output by the x-ray source; and/or a spot size of the x-rays output by the x-ray source.Type: GrantFiled: November 18, 2011Date of Patent: March 31, 2015Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
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Patent number: 8831179Abstract: During operation of an x-ray source, an electron source emits a beam of electrons. Moreover, a repositioning mechanism selectively repositions the beam of electrons on a surface of a target based on a feedback parameter, where a location of the beam of electrons on the surface of the target defines a spot size of x-rays output by the x-ray source. In response to receiving the beam of electrons, the target provides a transmission source of the x-rays. Furthermore, a beam-parameter detector provides the feedback parameter based on a physical characteristic associated with the beam of electrons and/or the x-rays output by the x-ray source. This physical characteristic may include: at least a portion of an optical spectrum emitted by the target, secondary electrons emitted by the target based on a cross-sectional shape of the beam of electrons; an intensity of the x-rays output by the target; and/or a current from the target.Type: GrantFiled: April 21, 2011Date of Patent: September 9, 2014Assignee: Carl Zeiss X-Ray Microscopy, Inc.Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
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Publication number: 20120269325Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In response to receiving the beam of focused electrons, the target provides a transmission source of x-rays. Moreover, a repositioning mechanism selectively repositions the beam of focused electrons to different locations on a surface of the target based on a feedback parameter associated with operation of the x-ray source. This feedback parameter may be based on: an intensity of the x-rays output by the x-ray source; a position of the x-rays output by the x-ray source; an elapsed time during operation of the x-ray source; a cross-sectional shape of the x-rays output by the x-ray source; and/or a spot size of the x-rays output by the x-ray source.Type: ApplicationFiled: November 18, 2011Publication date: October 25, 2012Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case
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Publication number: 20120269323Abstract: An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.Type: ApplicationFiled: November 18, 2011Publication date: October 25, 2012Inventors: David L. Adler, Wenbing Yun, Thomas Anthony Case