Patents by Inventor Thomas BEEG

Thomas BEEG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Self-contained metrology wafer carrier systems
    Patent number: 10818528
    Abstract: Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: October 27, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Abner Bello, Stephanie Waite, William J. Fosnight, Thomas Beeg
  • SELF-CONTAINED METROLOGY WAFER CARRIER SYSTEMS
    Publication number: 20190148180
    Abstract: Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
    Type: Application
    Filed: January 15, 2019
    Publication date: May 16, 2019
    Inventors: Abner Bello, Stephanie Waite, William J. Fosnight, Thomas Beeg
  • Self-contained metrology wafer carrier systems
    Patent number: 10242895
    Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: March 26, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Abner Bello, Stephanie Waite, William J. Fosnight, Thomas Beeg
  • SELF-CONTAINED METROLOGY WAFER CARRIER SYSTEMS
    Publication number: 20180143077
    Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
    Type: Application
    Filed: January 22, 2018
    Publication date: May 24, 2018
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Abner BELLO, Stephanie WAITE, William J. FOSNIGHT, Thomas BEEG
  • Self-contained metrology wafer carrier systems
    Patent number: 9911634
    Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: March 6, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Abner Bello, Stephanie Waite, William J. Fosnight, Thomas Beeg
  • SELF-CONTAINED METROLOGY WAFER CARRIER SYSTEMS
    Publication number: 20170372924
    Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.
    Type: Application
    Filed: June 27, 2016
    Publication date: December 28, 2017
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Abner BELLO, Stephanie WAITE, William J. FOSNIGHT, Thomas BEEG