Abstract: A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

Abstract: A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

Abstract: A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.

Abstract: A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.

Abstract: Closure element for a vacuum valve having a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, wherein the valve disk comprises a closure side and an oppositely situated rear side which is substantially parallel thereto and a first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point. The connection of the cross carrier to the valve disk comprises a friction stir welding connection at the at least one connection point.

Abstract: A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing.

Abstract: A door for closing a chamber opening (4) in a chamber wall of a vacuum chamber (3) in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged in a surrounding space, a closing member (5) arranged in the surrounding space, and a rod (10), to which the closing member (5) is connected, wherein a first movement of the rod (10), through which the closing member (5) is displaced from an open position into an intermediate position, occurring in the form of a displacement of the rod (10) in the direction of the longitudinal axis thereof, wherein a second movement of the rod (10) subsequent thereto occurs in the form of a displacement of the rod (10) in a direction at an angle to the longitudinal axis thereof and/or in the form of a pivoting of the rod (10) about a pivot axis which is perpendicular to the longitudinal axis thereof, wherein the closing member is displaced from the intermediate position into a closed position via said second movement of the rod.

Abstract: A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

Abstract: A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position.

Abstract: Closure element for a vacuum valve having a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, wherein the valve disk comprises a closure side and an oppositely situated rear side which is substantially parallel thereto and a first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point. The connection of the cross carrier to the valve disk comprises a friction stir welding connection at the at least one connection point.

Abstract: A vacuum valve including a closure element (3) and a valve housing (1) with a valve opening (4) and an interior (2) in which the closure element (3) is arranged, the closure element resting against a valve seat (6) surrounding the valve opening (4) in the closed state of the vacuum valve. The valve housing (1) has a housing wall (19) made of sheet metal, the housing wall delimiting the interior (2) and being provided with a window opening (20) in order to form the valve opening (4). The valve opening (4) is surrounded by a flange ring (21) that can be connected to a connection flange (28) of a vacuum unit (27) via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring (21) has the valve seat (6) on which the closure element (3) is placed in the closed state of the vacuum valve.

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Abstract: A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position.

Abstract: A vacuum valve including a closure element (3) and a valve housing (1) with a valve opening (4) and an interior (2) in which the closure element (3) is arranged, the closure element resting against a valve seat (6) surrounding the valve opening (4) in the closed state of the vacuum valve. The valve housing (1) has a housing wall (19) made of sheet metal, the housing wall delimiting the interior (2) and being provided with a window opening (20) in order to form the valve opening (4). The valve opening (4) is surrounded by a flange ring (21) that can be connected to a connection flange (28) of a vacuum unit (27) via screw connections, the vacuum unit having an interior and being attachable to the vacuum valve. The flange ring (21) has the valve seat (6) on which the closure element (3) is placed in the closed state of the vacuum valve.

Abstract: A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11).

Abstract: Valve (1), in particular vacuum valve, having a passage opening (2) and a closure member (3), it being possible for the closure member (3) to be moved by a valve drive (4) of the valve (1) in a closing direction (5) from an open position, in which it releases the passage opening (2), into a closed position, in which it closes the passage opening (2), and in the reverse direction. The closure member (3) is arranged in the closed position between two valve seats (6, 7) which lie opposite one another and surround the passage opening (2), and a first closure member part (8) of the closure member (3) bears against a first of the valve seats (6) in the closed position and a second closure member part (9) bears against the second valve seat (7) in the closed position. The closure member parts (8, 9) are mounted such that they can be displaced relative to one another in the closing direction (5).

Abstract: A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Abstract: A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11).

Abstract: A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.