Patents by Inventor THOMAS BOATWRIGHT

THOMAS BOATWRIGHT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for selecting recipe for defect inspection
    Patent number: 10338002
    Abstract: Methods and systems for selecting optical modes suitable for defect inspection are disclosed. A method may include: scanning a full-stack wafer of the particular type utilizing a set of optical modes to obtain a set of full-stack wafer images; and de-processing the full-stack wafer to produce a de-processed wafer based on a location of a potential defect of interest indicated by the set of full-stack wafer images to facilitate selection of optical modes suitable for defect inspection of wafers of the particular type.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: July 2, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Robert M. Danen, Shuo Sun, Thomas Boatwright
  • Scanning non-contact surface microrheometer
    Patent number: 9494505
    Abstract: The disclosure provides non-contact microrheological methods that can measure the fluctuation of a particle in a monolayer, where the particle is hydrodynamically coupled to the monolayer. The disclosure further comprises devices to carry out the non-contact microrheological methods thereof, including Laser Tweezer devices which can study in vitro biological processes.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: November 15, 2016
    Assignee: The Regents of the University of California
    Inventors: Michael Dennin, Thomas Boatwright, Alexander Levine, Arthur A. Evans, Roy Shlomovitz
  • SCANNING NON-CONTACT SURFACE MICRORHEOMETER
    Publication number: 20140150534
    Abstract: The disclosure provides non-contact microrheological methods that can measure the fluctuation of a particle in a monolayer, where the particle is hydrodynamically coupled to the monolayer. The disclosure further comprises devices to carry out the non-contact microrheological methods thereof, including Laser Tweezer devices which can study in vitro biological processes.
    Type: Application
    Filed: October 29, 2013
    Publication date: June 5, 2014
    Inventors: Michael Dennin, Thomas Boatwright, Alexander Levine, Arthur A. Evans, Roy Shlomovitz
  • METHOD AND APPARATUS FOR PROCESSING A WORKPIECE AND AN ARTICLE FORMED THEREBY
    Publication number: 20140138727
    Abstract: A manufacturing process is applicable to singulating die from a substrate, where the substrate has a layer distinguishable from the substrate by a mechanical property such as brittleness. The process can include providing a workpiece including a substrate and a layer disposed on a first surface, modifying the mechanical property such as by compression, deforming a region of the substrate proximate to the portion of the layer having the modified mechanical property; and fracturing the portion of the layer at a location proximate to the deformed region of the substrate. Also, the process can include propagating a crack through a region of the substrate on a line along the modified portion of the layer. A die formed in this manner is also provided.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 22, 2014
    Applicant: Electro Scientific Industries, Inc.
    Inventors: THOMAS CHANG, THOMAS BOATWRIGHT, JONATHAN D. HALDERMAN