Abstract: A lithographic apparatus having a table including a target and/or a sensor and a liquid displacing device to displace liquid from the target and/or sensor using a localized gas flow is disclosed. The liquid displacement device may be positioned at various positions, e.g. mounted to a liquid handling device at an exposure station, adjacent or in a transfer path between the exposure station and a measurement station, at a load/unload station or adjacent a sensor.

Abstract: A fluid handling structure configured to supply and confine immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. The fluid handling structure includes a supply passage formed therein for the passage of fluid from outside the fluid handling structure to the space, and a thermal isolator positioned adjacent the supply passage at least partly to isolate fluid in the supply passage from a thermal load induced in the fluid handling structure.

Abstract: A method of operating a lithographic apparatus is disclosed. The method includes moving a substrate table supporting a substrate relative to a projection system and adjusting the scanning speed between the substrate table and the projection system during imaging of a target within a predefined area at or near an edge of the substrate, or adjusting the stepping speed between adjacent target positions in a predefined area at or near the edge of the substrate, or both. The adjusting the scanning and/or stepping speed may comprise lowering the speed. The projection system is configured to project a patterned beam of radiation on to a target portion of the substrate.

Abstract: A lithographic apparatus having a table including a target and/or a sensor and a liquid displacing device to displace liquid from the target and/or sensor using a localized gas flow is disclosed. The liquid displacement device may be positioned at various positions, e.g. mounted to a liquid handling device at an exposure station, adjacent or in a transfer path between the exposure station and a measurement station, at a load/unload station or adjacent a sensor.

Abstract: A device is provided for the temporary storage of thermal energy with a solid storage medium and a pipe system made of individual pipes. The pipe system extends through the solid storage medium and an energy transfer medium flows through the pipe system. The solid storage medium and the pipe system being mechanically decoupled from one another.

Abstract: An immersion lithographic apparatus is described in which a droplet removal device removes droplets from the substrate, e.g. during exposures, using an angled flow of gas from a gas knife.

Abstract: A lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.

Abstract: A liquid handling system is disclosed in which an extractor to contain liquid in a space between the projection system of a lithographic apparatus and a substrate has, in plan, a shape with a single corner. The extractor is provided in a rotatable part of a liquid handling system. The rotatable part is rotated under the control of a controller.

Abstract: A lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.

Abstract: A liquid confinement system for use in immersion lithography is disclosed in which the meniscus of liquid between the liquid confinement system and the substrate is pinned substantially in place by a meniscus pinning feature. The meniscus pinning feature comprises a plurality of discrete outlets arranged in a polygonal shape.

Abstract: The present invention is directed to protecting network resources from unauthorized data packet streams. In particular, embodiments of the present invention provide for a port hopping arrangement in which a port pair associated with a communication channel is changed intermittently or periodically. In order to prevent the loss of authorized data packets due to network delay and jitter, a period of overlap during which a port and a successive port both accept data packets may be provided. Ports may be selected for use by providing endpoints to a communication with a common algorithm and seed value.

Abstract: A communications protocol that is used in a network having a hub device connected to a plurality of peripheral devices includes a synchronization beacon frame that is broadcast by the hub device to the peripheral devices for permitting the peripheral devices to synchronize to the network, a token frame that is broadcast by the hub device to the peripheral devices for allocating network bandwidth among the peripheral devices, a status response frame that is transmitted by the peripheral devices to the hub device for indicating whether the peripheral devices have data to transmit to the hub device, and a data frame. The synchronization beacon frame includes a beacon identifier that identifies a frame as the synchronization beacon frame, and a hub identifier that identifies an address of the hub device. The token frame includes a data portion that schedules a data transmission on the network, and a status response portion that schedules a status response transmission on the network.

Abstract: A personal area network includes a plurality of peripheral devices attached to the network, at least one attaching peripheral device requesting to attach to the network, and a hub device connected to the network and communicating with the plurality of peripheral devices. The hub device receives the attachment request from the attaching peripheral device, provides the attaching peripheral device with attachment approval and a time-out interval, and detaches the attaching peripheral device when the attaching peripheral device fails to communicate with the hub device for a period of time equal to the time-out interval.

Abstract: A network includes a hub device connected to a plurality of peripheral devices. The hub device includes a send token register, a receive token register, and a communication protocol engine. The send token register contains tokens for allocation of output data bandwidth. The receive token register contains tokens for allocation of input data bandwidth. The communication protocol engine alternately transmits the tokens from the send and receive token registers to ensure a split of the output and input data bandwidth on the network.