Patents by Inventor Thomas Chou
Thomas Chou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12237149Abstract: Embodiments of the present disclosure generally relate to a system used in a semiconductor device manufacturing process. More specifically, embodiments provided herein generally include apparatus and methods for synchronizing and controlling the delivery of an RF bias signal and a pulsed voltage waveform to one or more electrodes within a plasma processing chamber. The apparatus and methods disclosed herein can be useful to at least minimize or eliminate a microloading effect created while processing small dimension features that have differing densities across various regions of a substrate. The plasma processing methods and apparatus described herein are configured to improve the control of various characteristics of the generated plasma and control an ion energy distribution (IED) of the plasma generated ions that interact with a surface of a substrate during plasma processing.Type: GrantFiled: November 10, 2022Date of Patent: February 25, 2025Assignee: Applied Materials, Inc.Inventors: Deyang Li, Sunil Srinivasan, Yi-Chuan Chou, Shahid Rauf, Kuan-Ting Liu, Jason A. Kenney, Chung Liu, Olivier P. Joubert, Shreeram Jyoti Dash, Aaron Eppler, Michael Thomas Nichols
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Patent number: 12087402Abstract: Provided herein are computer implemented methods, systems and processes for determining a transmission metric or transmission path for related pathogens. Also provided herein is a non-transitory computer-readable storage medium with an executable program stored thereon, which program is configured to instruct a microprocessor to generate a transmission path for related pathogens.Type: GrantFiled: October 28, 2016Date of Patent: September 10, 2024Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Brian David Gross, Thomas Chou, Saeed Babaeizadeh, Pradyumna Dutta, Andrew Arthur, Henry Lin
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Publication number: 20240187096Abstract: Devices, systems and methods for encoding information using optical components are described. An example photonic filtered sampler includes a spectral shaper configured to receive an optical pulse train, a dispersive element positioned to receive an output of the spectral shaper and to expand spectral contents thereof in time, and a modulator configured to receive an output of the dispersive element and a radio frequency (RF) signal, and to produce a modulated output optical signal in accordance with the RF signal. In this configuration, one or more characteristics of the modulated output optical signal is determined based on a spectral shape provided by the spectral shaper and dispersive properties of the dispersive element.Type: ApplicationFiled: February 12, 2024Publication date: June 6, 2024Inventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Patent number: 12003272Abstract: Methods, devices and systems for providing accurate measurements of timing errors using optical techniques are described. An example timing measurement device includes an optical hybrid that receives two optical pulse trains and produces two or more phase shifted optical outputs. The timing measurement device further includes two or more optical filters that receive the outputs of the optical hybrid to produce multiple pulse signals with distinctive frequency bands. The device also includes one or more photodetectors and analog-to-digital converters to receive to produce electrical signals in the digital domain corresponding to the optical outputs of the hybrid. A timing error associated with the optical pulse trains can be determined using the electrical signals in digital domain based on a computed phase difference between a first frequency band signal and a second frequency band signal and a computed frequency difference between the first frequency band signal and the second frequency band.Type: GrantFiled: February 9, 2022Date of Patent: June 4, 2024Assignee: LAWRENCE LIVERMORE NATIONAL SECURITY, LLCInventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Joshua Linne Olson, Jason Thomas Chou
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Patent number: 11996889Abstract: Devices, systems and methods for encoding information using optical components are described. An example photonic filtered sampler includes a spectral shaper configured to receive an optical pulse train, a dispersive element positioned to receive an output of the spectral shaper and to expand spectral contents thereof in time, and a modulator configured to receive an output of the dispersive element and a radio frequency (RF) signal, and to produce a modulated output optical signal in accordance with the RF signal. In this configuration, one or more characteristics of the modulated output optical signal is determined based on a spectral shape provided by the spectral shaper and dispersive properties of the dispersive element.Type: GrantFiled: January 24, 2023Date of Patent: May 28, 2024Assignee: Lawrence Livermore National Security, LLCInventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Patent number: 11923907Abstract: Devices, methods for analog-to-digital converters (ADCs) that perform high-dynamic range measurements based on optical techniques are disclosed. In one example aspect, an optical encoder includes a polarization rotator configured to receive a train of optical pulses, and an electro-optic (EO) modulator coupled to an output of the polarization rotator. The EO modulator is configured to receive a radio frequency (RF) signal and to produce a phase modulated signal in accordance with the RF signal. The optical encoder also includes a polarizing beam splitter coupled to the output of the EO modulator; and an optical hybrid configured to receive two optical signals from the polarizing beam splitter and to produce four optical outputs that are each phase shifted with respect to one another.Type: GrantFiled: July 17, 2020Date of Patent: March 5, 2024Assignee: Lawrence Livermore National Security, LLCInventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Alexander Thomas Wargo, Jason Thomas Chou
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Patent number: 11630368Abstract: Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.Type: GrantFiled: December 10, 2021Date of Patent: April 18, 2023Assignee: LAWRENCE LIVERMORE NATIONAL SECURITY, LLCInventors: Apurva Shantharaj Gowda, Jacky Chak-Kee Chan, Peter Thomas Setsuda DeVore, David Simon Perlmutter, Jason Thomas Chou
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Patent number: 11575438Abstract: Devices, systems and methods for encoding information using optical components are described. Information associated with a first optical signal (e.g., an optical pump) is encoded onto the phase of a second optical signal (e.g., an optical probe) using cross phase modulation (XPM) in a non-linear optical medium. The optical signals are multiplexed together into the nonlinear optical medium. The probe experiences a modified index of refraction as it propagates through the medium and thus accumulates a phase change proportional to the intensity of the pump. The disclosed devices can be incorporated into larger components and systems for various applications such as scientific diagnostics, radar, remote sensing, wireless communications, and quantum computing that can benefit from encoding and generation of low noise, high resolution signals.Type: GrantFiled: October 13, 2021Date of Patent: February 7, 2023Assignee: LAWRENCE LIVERMORE NATIONAL SECURITY, LLCInventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Publication number: 20220337317Abstract: Devices, methods for analog-to-digital converters (ADCs) that perform high-dynamic range measurements based on optical techniques are disclosed. In one example aspect, an optical encoder includes a polarization rotator configured to receive a train of optical pulses, and an electro-optic (EO) modulator coupled to an output of the polarization rotator. The EO modulator is configured to receive a radio frequency (RF) signal and to produce a phase modulated signal in accordance with the RF signal. The optical encoder also includes a polarizing beam splitter coupled to the output of the EO modulator; and an optical hybrid configured to receive two optical signals from the polarizing beam splitter and to produce four optical outputs that are each phase shifted with respect to one another.Type: ApplicationFiled: July 17, 2020Publication date: October 20, 2022Inventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Alexander Thomas Wargo, Jason Thomas Chou
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Patent number: 11444690Abstract: Methods, devices and systems for providing accurate measurements of timing errors using optical techniques are described. An example timing measurement device includes an optical hybrid that receives two optical pulse trains and produces two or more phase shifted optical outputs. The timing measurement device further includes two or more optical filters that receive the outputs of the optical hybrid to produce multiple pulse signals with distinctive frequency bands. The device also includes one or more photodetectors and analog-to-digital converters to receive to produce electrical signals in the digital domain corresponding to the optical outputs of the hybrid. A timing error associated with the optical pulse trains can be determined using the electrical signals in digital domain based on a computed phase difference between a first frequency band signal and a second frequency band signal and a computed frequency difference between the first frequency band signal and the second frequency band.Type: GrantFiled: June 10, 2020Date of Patent: September 13, 2022Assignee: Lawrence Livermore National Security, LLCInventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Joshua Linne Olson, Jason Thomas Chou
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Publication number: 20220231760Abstract: Methods, devices and systems for providing accurate measurements of timing errors using optical techniques are described. An example timing measurement device includes an optical hybrid that receives two optical pulse trains and produces two or more phase shifted optical outputs. The timing measurement device further includes two or more optical filters that receive the outputs of the optical hybrid to produce multiple pulse signals with distinctive frequency bands. The device also includes one or more photodetectors and analog-to-digital converters to receive to produce electrical signals in the digital domain corresponding to the optical outputs of the hybrid. A timing error associated with the optical pulse trains can be determined using the electrical signals in digital domain based on a computed phase difference between a first frequency band signal and a second frequency band signal and a computed frequency difference between the first frequency band signal and the second frequency band.Type: ApplicationFiled: February 9, 2022Publication date: July 21, 2022Inventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Joshua Linne Olson, Jason Thomas Chou
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Publication number: 20220168332Abstract: New polynucleotides and new expression vectors for multiplexed microRNA-based shRNAs are provided. The shRNAs generated from these polynucleotides and vectors can knock down the expression of multiple genes with minimum undesirable levels of off-target effects.Type: ApplicationFiled: April 24, 2020Publication date: June 2, 2022Inventors: Hidevaldo Bueno Machado, Eldon Thomas Chou
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Publication number: 20220100047Abstract: Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.Type: ApplicationFiled: December 10, 2021Publication date: March 31, 2022Inventors: Apurva Shantharaj Gowda, Jacky Chak-Kee Chan, Peter Thomas Setsuda DeVore, David Simon Perlmutter, Jason Thomas Chou
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Publication number: 20220085887Abstract: Devices, systems and methods for encoding information using optical components are described. Information associated with a first optical signal (e.g., an optical pump) is encoded onto the phase of a second optical signal (e.g., an optical probe) using cross phase modulation (XPM) in a non-linear optical medium. The optical signals are multiplexed together into the nonlinear optical medium. The probe experiences a modified index of refraction as it propagates through the medium and thus accumulates a phase change proportional to the intensity of the pump. The disclosed devices can be incorporated into larger components and systems for various applications such as scientific diagnostics, radar, remote sensing, wireless communications, and quantum computing that can benefit from encoding and generation of low noise, high resolution signals.Type: ApplicationFiled: October 13, 2021Publication date: March 17, 2022Inventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Patent number: 11209714Abstract: Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.Type: GrantFiled: January 24, 2020Date of Patent: December 28, 2021Assignee: Lawrence Livermore National Security, LLCInventors: Apurva Shantharaj Gowda, Jacky Chak-Kee Chan, Peter Thomas Setsuda DeVore, David Simon Perlmutter, Jason Thomas Chou
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Patent number: 11184087Abstract: Devices, systems and methods for encoding information using optical components are described. Information associated with a first optical signal (e.g., an optical pump) is encoded onto the phase of a second optical signal (e.g., an optical probe) using cross phase modulation (XPM) in a non-linear optical medium. The optical signals are multiplexed together into the nonlinear optical medium. The probe experiences a modified index of refraction as it propagates through the medium and thus accumulates a phase change proportional to the intensity of the pump. The disclosed devices can be incorporated into larger components and systems for various applications such as scientific diagnostics, radar, remote sensing, wireless communications, and quantum computing that can benefit from encoding and generation of low noise, high resolution signals.Type: GrantFiled: April 10, 2020Date of Patent: November 23, 2021Assignee: Lawrence Livermore National Security, LLCInventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Patent number: 11159241Abstract: Devices, methods for analog-to-digital converters (ADCs) that perform high-dynamic range measurements based on optical techniques are disclosed. In one example aspect, an optical encoder includes a polarization rotator configured to receive a train of optical pulses, and an electro-optic (EO) modulator coupled to an output of the polarization rotator. The EO modulator is configured to receive a radio frequency (RF) signal and to produce a phase modulated signal in accordance with the RF signal. The optical encoder also includes a polarizing beam splitter coupled to the output of the EO modulator; and an optical hybrid configured to receive two optical signals from the polarizing beam splitter and to produce four optical outputs that are each phase shifted with respect to one another.Type: GrantFiled: May 11, 2020Date of Patent: October 26, 2021Assignee: Lawrence Livermore National Security, LLCInventors: Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, David Simon Perlmutter, Alexander Thomas Wargo, Jason Thomas Chou
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Patent number: 11032628Abstract: Device, methods and systems for the electronic demodulation of optically phase demodulated signals are described. An example optical local oscillator generator configured to generate a radio frequency (RF) tone at a desired RF frequency includes a first input configured to receive a broadband optical pulse train, a second input coupled to a delay line interferometer to receive a first control voltage for controlling a delay value of the interferometer and to produce an output optical pulse train, a dispersive element, coupled to the delay line interferometer, to map the output optical pulse train to a time-domain modulated optical pulse train, an optical-to-electrical converter, coupled to the dispersive element, to convert the time-domain modulated optical pulse train to an analog electrical signal, and an RF filter, coupled to the optical-to-electrical converter, to filter the analog electrical signal to generate the RF tone at the desired RF frequency.Type: GrantFiled: May 7, 2020Date of Patent: June 8, 2021Assignee: Lawrence Livermore National Security, LLCInventors: David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Publication number: 20210044353Abstract: Devices, systems and methods for encoding information using optical components are described. Information associated with a first optical signal (e.g., an optical pump) is encoded onto the phase of a second optical signal (e.g., an optical probe) using cross phase modulation (XPM) in a non-linear optical medium. The optical signals are multiplexed together into the nonlinear optical medium. The probe experiences a modified index of refraction as it propagates through the medium and thus accumulates a phase change proportional to the intensity of the pump. The disclosed devices can be incorporated into larger components and systems for various applications such as scientific diagnostics, radar, remote sensing, wireless communications, and quantum computing that can benefit from encoding and generation of low noise, high resolution signals.Type: ApplicationFiled: April 10, 2020Publication date: February 11, 2021Inventors: Brandon Walter Buckley, David Simon Perlmutter, Peter Thomas Setsuda DeVore, Apurva Shantharaj Gowda, Jason Thomas Chou
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Publication number: 20210018814Abstract: Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.Type: ApplicationFiled: January 24, 2020Publication date: January 21, 2021Inventors: Apurva Shantharaj Gowda, Jacky Chak-Kee Chan, Peter Thomas Setsuda DeVore, David Simon Perlmutter, Jason Thomas Chou