Abstract: A test station holds a semiconductor wafer during electrical testing with an electrical test apparatus and optical inspection with an optical system. The test station allows wafer probing to be aligned external to the optical system. After the wafer is in alignment, the test station may be transported to the optical system for inspection from a back side of the wafer while having electrical testing by the electrical test apparatus from the front side. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.