Abstract: The present invention relates to a vacuum safety valve for a vacuum pump, in particular for a rotary vane pump, comprising a housing having a flow path extending between an inlet and an outlet for a gas to be conveyed, a valve region that is disposed in the flow path and in which a valve closure element is arranged that is movable between a closed position and an open position, a control space that is associated with the valve region and in which a membrane separating the pressure side from an operating side is arranged, and a control element active between the membrane and the closure element, wherein the closure element is movable via the control element against a return force from the closed position into the open position by means of the membrane acted on at the pressure side and is movable back into the closed position on a removal of the membrane load due to the return force and is held in the closed position.

Abstract: The present invention relates to a vacuum safety valve for a vacuum pump, in particular for a rotary vane pump, comprising a housing having a flow path extending between an inlet and an outlet for a gas to be conveyed, a valve region that is disposed in the flow path and in which a valve closure element is arranged that is movable between a closed position and an open position, a control space that is associated with the valve region and in which a membrane separating the pressure side from an operating side is arranged, and a control element active between the membrane and the closure element, wherein the closure element is movable via the control element against a return force from the closed position into the open position by means of the membrane acted on at the pressure side and is movable back into the closed position on a removal of the membrane load due to the return force and is held in the closed position.

Abstract: A sealing arrangement which is designed for a cylinder-piston arrangement of a reciprocating piston vacuum pump for sealing a gap between a cylinder wall and a piston displaceable in the cylinder, includes at least one L-shaped annular seal having one of its leg secured on the piston for providing a static sealing, and its another free leg adjoining the cylinder wall for providing a dynamic sealing, and an annular guide member arranged on the piston between the piston and the cylinder on a side of the seal remote from a compression chamber of the pump.

Abstract: A vacuum pump includes at least two stages (2, 3), a motor (8) for driving pump-active elements of the two stages (2, 3), a transmission unit (7) for transmitting driving power from the motor (8) to the pump-active elements, a motor control (9) for controlling a rotational speed of the motor (8), and an evaluation unit (12) electrically connectable with pressure-sensitive signal sensor (10) located between the two stages for receiving a signal generated by the signal sensor and connected with the motor control (9) for transmitting an evaluated signal thereto, so that the motor control (9) can change a rotational speed of the motor (8) in accordance with the received evaluated signal.

Abstract: A sealing arrangement which is designed for a cylinder-piston arrangement of a reciprocating piston vacuum pump for sealing a gap between a cylinder wall and a piston displaceable in the cylinder, includes at least one L-shaped annular seal having one of its leg secured on the piston for providing a static sealing, and its another free leg adjoining the cylinder wall for providing a dynamic sealing, and an annular guide member arranged on the piston between the piston and the cylinder on a side of the seal remote from a compression chamber of the pump.