Patents by Inventor Thomas D. Lamson

Thomas D. Lamson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Beam re-registration system and method
    Patent number: 7456414
    Abstract: A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a re-registration controller adapted to control the servos. The re-registration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: November 25, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Eugene Mirro, Jr., Benyamin Buller, Thomas D. Lamson