Abstract: An apparatus for generating laser radiation from discharges in a gap, in a discharge chamber in which the discharges cause acoustic waves that reflect off of internal surfaces in the discharge chamber. The gap is angled with respect to the surfaces of structures in the chamber proximate to the gap so that acoustic waves reflected by those surfaces are less likely to reflect back to their origin and interfere with the operation of the laser especially at high repetition rates.

Abstract: An apparatus for generating laser radiation from discharges in a discharge chamber in which the discharges produce acoustic waves which would disrupt operation of the apparatus at certain repetition rates if reflected back to their origin in which the surface of a preionizer tube positioned in the discharge chamber is provided with acoustic scattering features which scatter acoustic waves impinging on the preionizer tube surface. The preionizer tube may also be configured to have a transverse cross section that presents an angled surface to the region in which discharges are produced.

Abstract: A radiation source includes a chamber, a window, and a conduit system. The chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window. The conduit system may include one or more unidirectional valves which may be magnetic check valves. A magnet component of the magnetic check valve may be disposed external to the conduit and the chamber so that the magnet component is not subjected to corrosion by the gas in the conduit or the chamber.

Abstract: A pulsed-discharge radiation source includes a gas chamber, a window, and a conduit system. The conduit system includes a refill path and a conduit. The pulsed-discharge radiation source generates radiation. The gas chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the gas chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit circulates the gas to or from the gas chamber during the generating. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window, whereby the conduit system increases the usable lifetime of at least the window.

Abstract: A pulsed-discharge radiation source includes a gas chamber, a window, and a conduit system. The conduit system includes a refill path and a conduit. The pulsed-discharge radiation source generates radiation. The gas chamber confines a gas and contaminants produced during the generation of radiation. The window isolates the gas from an environment external to the gas chamber and allows the radiation to travel between the gas chamber and the environment. The refill path allows a replacement of the gas. The conduit circulates the gas to or from the gas chamber during the generating. The conduit system directs a flow of one of a refill gas, the gas, or the refill gas and the gas at least during a refill operation to prevent the contaminant from contacting the window, whereby the conduit system increases the usable lifetime of at least the window.

Abstract: A light source apparatus (100) includes: a chamber (101) having a chamber wall (103) defining an opening (107); and a support apparatus (110) including a support device (111) positioned within the opening of the chamber wall. The support device includes: a cup (112) having an inner surface (114) configured to retain a movable apparatus and an outer surface (116) having a first outer diameter; and a plurality of rods (118) arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.

Abstract: A light source apparatus (100) includes: a chamber (101) having a chamber wall (103) defining an opening (107); and a support apparatus (110) including a support device (111) positioned within the opening of the chamber wall. The support device includes: a cup (112) having an inner surface (114) configured to retain a movable apparatus and an outer surface (116) having a first outer diameter; and a plurality of rods (118) arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.