Patents by Inventor Thomas Duffey

Thomas Duffey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8982922
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: March 17, 2015
    Assignee: Cymer, LLC
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • Publication number: 20140300888
    Abstract: The present invention concerns motion-stabilised LIDAR (100), MS-LIDAR, for measurement of wind speed, comprising: a stabiliser unit (25) having a having a probe end (30) for attachment to a laser radar, LIDAR (10), and a base end (40) for attachment to a buoyant platform (80), which stabiliser unit (25) is configured for at least partial isolation of motions of the base end (40) from the probe end (30); a LIDAR (10), attached in fixed relation to the probe end (40); a motion detector in fixed relation to the probe end (30); which MS-LIDAR (100) is arranged to make wind speed measurements at one or more remote probe volumes.
    Type: Application
    Filed: November 29, 2011
    Publication date: October 9, 2014
    Applicant: Flidar
    Inventors: Thomas Duffey, Athanasios Stefanos Kyriazis, Dirk Devriendt, Werner Coppye
  • Publication number: 20120307858
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Application
    Filed: August 17, 2012
    Publication date: December 6, 2012
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • Patent number: 8284815
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: October 9, 2012
    Assignee: Cymer, Inc.
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • Publication number: 20100098120
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Application
    Filed: October 9, 2009
    Publication date: April 22, 2010
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • Publication number: 20060274809
    Abstract: A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining.
    Type: Application
    Filed: July 18, 2006
    Publication date: December 7, 2006
    Inventors: Thomas Steiger, Joshua Brown, Thomas Duffey, Walter Gillespie, Richard Morton
  • Publication number: 20050047471
    Abstract: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the fi
    Type: Application
    Filed: June 25, 2004
    Publication date: March 3, 2005
    Inventors: Thomas Steiger, Richard Ujazdowski, Timothy Dyer, Thomas Duffey, Walter Gillespie, Bryan Moosman, Richard Morton, Brian Strate