Patents by Inventor Thomas E. Devan

Thomas E. Devan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer handling apparatus and method of manufacturing thereof
    Patent number: 7364624
    Abstract: A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.
    Type: Grant
    Filed: January 16, 2004
    Date of Patent: April 29, 2008
    Assignee: Momentive Performance Materials Inc.
    Inventors: John Thomas Mariner, Timothy J. Hejl, Douglas Alan Longworth, Jeffrey Lennartz, Ajit Sane, Andrew John Macey, Jon Leist, Thomas E. Devan
  • Wafer handling apparatus and method of manufacturing thereof
    Publication number: 20040173161
    Abstract: A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.
    Type: Application
    Filed: January 16, 2004
    Publication date: September 9, 2004
    Applicant: General Electric Company
    Inventors: John Thomas Mariner, Timothy J. Hejl, Douglas Alan Longworth, Jeffrey Lennart, Ajit Sane, Andrew John Macey, Jon Leist, Thomas E. Devan