Patents by Inventor Thomas E. Fenstermacher

Thomas E. Fenstermacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Collimated x-ray source for x-ray lithographic system
    Patent number: 3947687
    Abstract: In an X-ray lithographic system, high power X-ray illumination of photo-resist coated substrate members is accomplished by projecting a collimated X-ray beam, emitted from an extended area X-ray source, through the patterned apertures of an X-ray absorbent mask. Improved efficiency is achieved by limiting X-ray emission to the discrete portions of the extended area emission surface that corresponds to related patterned mask apertures.
    Type: Grant
    Filed: October 23, 1974
    Date of Patent: March 30, 1976
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventor: Thomas E. Fenstermacher