Patents by Inventor Thomas E. Tiwald

Thomas E. Tiwald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10073120
    Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: September 11, 2018
    Assignees: BOARD OF REGENTS FOR THE UNIVERSITY OF NEBRASKA, J.A. WOOLLAM CO., INC.
    Inventors: Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Philipp Kuehne, Craig M. Herzinger, John A. Woollam, Gregory K. Pribil, Thomas E. Tiwald, Sean R. Knight
  • Patent number: 9851294
    Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: December 26, 2017
    Assignees: J.A. WOOLLAM CO., INC., UNIVERSITY OF NEBRASKA BOARD OF REGENTS
    Inventors: Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Sean Knight, Craig M. Herzinger, John A. Woollam, Greg K. Pribil, Thomas E. Tiwald
  • Patent number: 9599569
    Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: March 21, 2017
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Thomas E. Tiwald, Jeremy A. Van Derslice
  • Publication number: 20160274032
    Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
    Type: Application
    Filed: April 28, 2016
    Publication date: September 22, 2016
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Thomas E. Tiwald, Jeremy A. Van Derslice
  • Publication number: 20140356520
    Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
    Type: Application
    Filed: May 22, 2014
    Publication date: December 4, 2014
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Thomas E. Tiwald, Jeremy A. VanDerslice
  • Patent number: 8531665
    Abstract: An ellipsometer system comprising a small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: September 10, 2013
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald
  • Patent number: 8493565
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: July 23, 2013
    Assignee: J.A. Wollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt
  • Patent number: 8159672
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Patent number: 8130375
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
    Type: Grant
    Filed: July 28, 2009
    Date of Patent: March 6, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt
  • Patent number: 7817266
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: October 19, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald
  • Patent number: 7777883
    Abstract: A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.
    Type: Grant
    Filed: June 10, 2008
    Date of Patent: August 17, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Thomas E. Tiwald
  • Patent number: 7636161
    Abstract: A system for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: December 22, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas E. Tiwald
  • Patent number: 7623237
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: November 24, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Publication number: 20090027679
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.
    Type: Application
    Filed: July 24, 2008
    Publication date: January 29, 2009
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald
  • Publication number: 20080266559
    Abstract: A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.
    Type: Application
    Filed: June 10, 2008
    Publication date: October 30, 2008
    Inventors: Ronald Synowicki, Thomas E. Tiwald
  • Patent number: 7385697
    Abstract: Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.
    Type: Grant
    Filed: May 20, 2004
    Date of Patent: June 10, 2008
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Corey L. Bungay, Thomas E. Tiwald, Martin M. Liphardt, Ronald A. Synowicki, Gregory K. Pribil, Craig M. Herzinger, Blaine D. Johs, James N. Hilfiker
  • Patent number: 7349092
    Abstract: A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: March 25, 2008
    Assignee: J.A. Woollam Co., Inc
    Inventors: Thomas E. Tiwald, John A. Woollam, Galen L. Pfeiffer, Blaine D. Johs, Craig M. Herzinger
  • Patent number: 7283234
    Abstract: Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and/or removal of minute amounts of materials onto, or from, said process and/or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: October 16, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Thomas E. Tiwald, Martin M. Liphardt, James D. Welch
  • Patent number: 7265839
    Abstract: Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas E. Tiwald
  • Patent number: 7193709
    Abstract: Use of differences in spectroscopic spectra resulting from multiple sample investigation, or sequential investigation of the same sample in evaluation of sample characterizing parameters such as ultra-thin film thickness.
    Type: Grant
    Filed: January 27, 2004
    Date of Patent: March 20, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Thomas E. Tiwald