Abstract: An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

Abstract: A self-aligning connector in which the corresponding male and female members are rotated into mating alignment by the conversion of axially directed force into rotational torque about the mating axis. The aligning feature resides in each member having a corresponding intermediate cylindrical body with an elongated, axial keying protrusion which extends by defined contour into a keyway on the opposite side of the cylindrical body. Misalignment of the connector members during mating causes the keying protrusions to strike the contours on the opposite cylindrical body obliquely so as to impart a torque until the keying protrusions, keyways and connector mating elements are properly oriented. Once oriented, the connector members translate along the mating axis to an engaged state in response to the continued application of axially directed force.