Patents by Inventor Thomas F. McMullen

Thomas F. McMullen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reticle for use in photolithography and methods for inspecting and making same
    Patent number: 6379848
    Abstract: A method for inspecting a reticle to evaluate the degree of corner rounding of a feature of a test pattern includes placing a reticle having a photomask formed thereon under a microscope. The photomask has a pattern corresponding to features of a semiconductor chip design defined therein. In addition, the photomask further has a test pattern and a crosshair orientation mark defined therein. The test pattern has at least one test corner for evaluating a degree of corner rounding when the test pattern is defined in the photomask. The crosshair orientation mark is defined in the photomask to orient a crosshair of the microscope relative to the test pattern. Once the crosshair of the microscope is aligned with the crosshair orientation mark, the crosshair of the microscope is used to evaluate the degree of rounding of the test corner of the test pattern.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: April 30, 2002
    Assignee: Philips Electronics No. America Corp.
    Inventor: Thomas F. McMullen