Patents by Inventor Thomas Franz Karl Scheruebl

Thomas Franz Karl Scheruebl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removing a particle from a mask system
    Patent number: 11774870
    Abstract: A method for removing particles from a mask system for a projection exposure apparatus, including the following method steps: detecting the particle in the mask system, providing laser radiation, and removing the particle by irradiating the particle with laser radiation. The wavelength of the laser radiation corresponds to that of used radiation used by the projection exposure apparatus.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: October 3, 2023
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss SMS Ltd.
    Inventors: Sergey Oshemkov, Shao-Chi Wei, Joerg Frederik Blumrich, Martin Voelcker, Thomas Franz Karl Scheruebl
  • METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM
    Publication number: 20230053667
    Abstract: The invention relates to a method for removing particles from a mask system for a projection exposure apparatus, comprising the following method steps: detecting the particle in the mask system, providing laser radiation, removing the particle by irradiating the particle with laser radiation. According to the invention, the wavelength of the laser radiation corresponds to that of used radiation used by the projection exposure apparatus.
    Type: Application
    Filed: August 8, 2022
    Publication date: February 23, 2023
    Inventors: Sergey Oshemkov, Shao-Chi Wei, Joerg Frederik Blumrich, Martin Voelcker, Thomas Franz Karl Scheruebl