Patents by Inventor Thomas Gary Miller

Thomas Gary Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240071040
    Abstract: Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
    Type: Application
    Filed: November 7, 2023
    Publication date: February 29, 2024
    Inventors: Thomas Gary Miller, John F. Flanagan, IV, Brian Routh, JR., Richard Young, Brad Larson, Aditee Shrotre
  • Patent number: 11847813
    Abstract: Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
    Type: Grant
    Filed: October 12, 2021
    Date of Patent: December 19, 2023
    Assignee: FEI Company
    Inventors: Thomas Gary Miller, John F. Flanagan, IV, Brian Routh, Jr., Richard Young, Brad Larson, Aditee Shrotre
  • Publication number: 20230197403
    Abstract: Methods and apparatus are disclosed for integration of image-based metrology into a milling workflow. A first ion beam milling operation is performed to an edge at a distance from a final target position on a sample. An SEM image of the sample is used to determine a distance between the milled edge and a reference structure on the sample. Based on the determined distance, the ion beam is adjusted to perform a second milling operation to shift the milled edge to the final target position. Extensions to iterative procedures are disclosed. Various geometric configurations and corrections are disclosed. Manufacturing and analytic applications are disclosed in a variety of fields, including read-write head manufacture and TEM sample preparation. Other combinations of imaging and milling tools can be used.
    Type: Application
    Filed: July 26, 2022
    Publication date: June 22, 2023
    Applicant: FEI Company
    Inventors: Thomas Gary Miller, Jason Arjavac, Brian Routh, JR., Mark Biedrzycki
  • Publication number: 20220067915
    Abstract: Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
    Type: Application
    Filed: October 12, 2021
    Publication date: March 3, 2022
    Applicant: FEI Company
    Inventors: Thomas Gary Miller, John F. Flanagan, IV, Brian Routh, JR., Richard Young, Brad Larson, Aditee Shrotre
  • Patent number: 11176656
    Abstract: Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: November 16, 2021
    Assignee: FEI Company
    Inventors: Thomas Gary Miller, John F. Flanagan, IV, Brian Routh, Jr., Richard Young, Brad Larson, Aditee Shrotre
  • Publication number: 20200279362
    Abstract: Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
    Type: Application
    Filed: May 10, 2019
    Publication date: September 3, 2020
    Applicant: FEI Company
    Inventors: Thomas Gary Miller, John F. Flanagan, IV, Brian Routh, JR., Richard Young, Brad Larson, Aditee Shrotre