Patents by Inventor Thomas Gorius

Thomas Gorius has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12105434
    Abstract: An assembly, for example in a microlithographic projection exposure apparatus, comprises an optical element and a joint arrangement for mechanically bearing the optical element. The joint arrangement comprises at least one connecting element secured on the optical element. The mass of the connecting element is distributed over its length so that the moment of inertia of the connecting element is increased in comparison with a connecting element of identical mass and length in which the mass is distributed uniformly over the length.
    Type: Grant
    Filed: October 17, 2022
    Date of Patent: October 1, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stefan Troeger, Thomas Gorius
  • Publication number: 20230324649
    Abstract: A filter assembly, for example for a control loop for controlling the position of at least one element, comprises first and second filters. The first filter suppresses an undesired component in a signal to be filtered. The first filter produces a first signal delay in a first frequency range. The second filter produces a second signal delay in the first frequency range. The second signal delay at least partly compensates the first signal delay.
    Type: Application
    Filed: June 13, 2023
    Publication date: October 12, 2023
    Inventor: Thomas Gorius
  • Publication number: 20230034958
    Abstract: An assembly, for example in a microlithographic projection exposure apparatus, comprises an optical element and a joint arrangement for mechanically bearing the optical element. The joint arrangement comprises at least one connecting element secured on the optical element. The mass of the connecting element is distributed over its length so that the moment of inertia of the connecting element is increased in comparison with a connecting element of identical mass and length in which the mass is distributed uniformly over the length.
    Type: Application
    Filed: October 17, 2022
    Publication date: February 2, 2023
    Inventors: Stefan Troeger, Thomas Gorius
  • Patent number: 8660764
    Abstract: A method for actuating a friction clutch, in particular for a motor vehicle drivetrain. The friction clutch is acted on with a clutch pressure generated by a hydraulic actuator arrangement which has an electrically actuable fluid source and which has a hydraulic actuator whose state is characterized by an actuator actual value. The actuator actual value is related to the clutch pressure. The method has the steps: forming a regulation-oriented model of the actuator arrangement, which model has at least one fluid source actuating variable as an input and at least the actuator actual value as a flat output and which model can be inverted; forming an inverse model of the actuator arrangement; and inputting an actuator nominal value into the inverse model and using the model actuating variable which emerges therefrom for actuating the fluid source.
    Type: Grant
    Filed: May 11, 2011
    Date of Patent: February 25, 2014
    Assignee: GETRAG Getriebe- und Zahnradfabrik Hermann Hagenmeyer GmbH & Cie KG
    Inventors: Thomas Gorius, Joerg Meissner
  • Publication number: 20110278129
    Abstract: A method for actuating a friction clutch, in particular for a motor vehicle drivetrain. The friction clutch is acted on with a clutch pressure generated by a hydraulic actuator arrangement which has an electrically actuable fluid source and which has a hydraulic actuator whose state is characterized by an actuator actual value. The actuator actual value is related to the clutch pressure. The method has the steps: forming a regulation-oriented model of the actuator arrangement, which model has at least one fluid source actuating variable as an input and at least the actuator actual value as a flat output and which model can be inverted; forming an inverse model of the actuator arrangement; and inputting an actuator nominal value into the inverse model and using the model actuating variable which emerges therefrom for actuating the fluid source.
    Type: Application
    Filed: May 11, 2011
    Publication date: November 17, 2011
    Applicant: GETRAG Getriebe- und Zahnradfabrik Hermann Hagenmeyer GmbH & Cie KG
    Inventors: Thomas Gorius, Joerg Meissner