Patents by Inventor Thomas Grobelny

Thomas Grobelny has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates
    Publication number: 20080096313
    Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
    Type: Application
    Filed: December 11, 2007
    Publication date: April 24, 2008
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Satayadev Patel, Andrew Huibers, Steve Chiang, Robert Duboc, Thomas Grobelny, Hung Nan Chen, Dietrich Dehlinger, Peter Richards, Hongqin Shi, Anthony Sun
  • Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
    Publication number: 20050074919
    Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
    Type: Application
    Filed: June 11, 2002
    Publication date: April 7, 2005
    Applicant: REFLECTIVITY, INC.
    Inventors: Satayadev Patel, Andrew Huibers, Steve Chiang, Robert Duboc, Thomas Grobelny, Hung Chen, Dietrich Dehlinger, Peter Richards, Hongqin Shi, Anthony Sun