Patents by Inventor Thomas Hall Baum

Thomas Hall Baum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the repair of defects in lithographic masks
    Patent number: 6159641
    Abstract: The present invention relates to a method for the repair of defects in the nonprinting region of a phase-shifting optical lithography mask by depositing an opaque material on the defect from a gaseous precursor by beam-induced deposition.
    Type: Grant
    Filed: December 16, 1993
    Date of Patent: December 12, 2000
    Assignee: International Business Machines Corporation
    Inventors: Thomas Hall Baum, Paul Brian Comita, Franklin Mark Schellenberg
  • Method for the repair of lithographic masks
    Patent number: 5686206
    Abstract: The present invention relates to a method for the repair of void type defects in phase-shifting optical lithography masks by depositing a transparent mateial on the defect from a gaseous precursor by ultraviolet beam-induced deposition.
    Type: Grant
    Filed: November 18, 1994
    Date of Patent: November 11, 1997
    Assignee: International Business Machines Corporation
    Inventors: Thomas Hall Baum, Paul Brian Comita, Frank M. Schellenberg