Patents by Inventor Thomas Halter

Thomas Halter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the production of a substrate
    Patent number: 7429543
    Abstract: Method for producing a substrate includes establishing a plasma discharge with a locally inhomogeneous density distribution and exposing the substrate to the inhomogeneously density-distributed plasma discharge. The distribution is established by establishing a specified relative movement of the inhomogeneous density distribution and of the substrate and establishing a specified time variation of an electric power signal supplying the discharge and/or of an optionally provided further electric signal which connects the substrate to bias voltage. When the electric power signal or further electric signal is an AC signal, the specified time variation of the signal addresses its modulation and the method includes setting the variation and the movement.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: September 30, 2008
    Assignee: OC Oerlikon Balzers AG
    Inventors: Stanislav Kadlec, Eduard Kügler, Thomas Halter
  • METHOD FOR THE PRODUCTION OF A SUBSTRATE
    Publication number: 20070084715
    Abstract: Method for producing a substrate includes establishing a plasma discharge with a locally inhomogeneous density distribution and exposing the substrate to the inhomogeneously density-distributed plasma discharge. The distribution is established by establishing a specified relative movement of the inhomogeneous density distribution and of the substrate and establishing a specified time variation of an electric power signal supplying the discharge and/or of an optionally provided further electric signal which connects the substrate to bias voltage. When the electric power signal or further electric signal is an AC signal, the specified time variation of the signal addresses its modulation and the method includes setting the variation and the movement.
    Type: Application
    Filed: October 6, 2006
    Publication date: April 19, 2007
    Inventors: Stanislav Kadlec, Eduard Kugler, Thomas Halter
  • Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
    Patent number: 7138343
    Abstract: In order to produce substrate surfaces with a given two-dimensional surface distribution arising from a treatment using a vacuum treatment process, an inhomogeneous plasma (5) with a density distribution is generated and moved relative to the substrate (9) with a given movement.
    Type: Grant
    Filed: November 13, 2003
    Date of Patent: November 21, 2006
    Assignee: OC Oerlikon Balzers AG
    Inventors: Stanislav Kadlec, Eduard Kügler, Thomas Halter
  • Method for the production of a substrate and unit for the same
    Publication number: 20060054493
    Abstract: In order to produce substrate surfaces with a given two-dimensional surface distribution arising from a treatment using a vacuum treatment process, an inhomogeneous plasma (5) with a density distribution is generated and moved relative to the substrate (9) with a given movement.
    Type: Application
    Filed: November 13, 2003
    Publication date: March 16, 2006
    Inventors: Stanislav Kadlec, Eduard Kugler, Thomas Halter