Abstract: Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

Abstract: Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

Abstract: Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

Abstract: This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.

Abstract: Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

Abstract: This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.

Abstract: This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.

Abstract: This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.

Abstract: Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.

Abstract: The present invention is directed to nuclear factor ?B (NF?B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF?B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF?B induction in a patient, methods and compositions for lowering NF?B induction in a patient, methods for inhibiting inflammation, and methods for manufacture of a medicament intended for the treatment and/or prevention of an NF?B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: The present invention is directed to nuclear factor ?B (NF?B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF?B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF?B induction in a patient, methods and compositions for lowering NF?B induction in a patient, methods for inhibiting inflammation, and methods for manufacutre of a medicament intended for the treatment and/or prevention of an NF?B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: The present invention is directed to nuclear factor ?B (NF?B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF?B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF?B induction in a patient, methods and compositions for lowering NF?B induction in a patient, methods for inhibiting inflammation, and methods for manufacture of a medicament intended for the treatment and/or prevention of an NF?B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.

Abstract: The present invention is directed to nuclear factor ?B (NF?B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF?B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF?B induction in a patient, methods and compositions for lowering NF?B induction in a patient, methods for inhibiting inflammation, and methods for manufacutre of a medicament intended for the treatment and/or prevention of an NF?B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: The present invention is directed to nuclear factor ?B (NF?B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF?B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF?B induction in a patient, methods and compositions for lowering NF?B induction in a patient, methods for inhibiting inflammation, and methods for manufacture of a medicament intended for the treatment and/or prevention of an NF?B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: The present invention is directed to nuclear factor &kgr;B (NF&kgr;B)-inducing factor polypeptides (NFIF polypeptides) which are capable of inducing NF&kgr;B. The present invention includes within its scope NFIF polypeptides, including NFIF-14b and NFIF-7a, DNA, including cDNA, encoding these polypeptides, and expression vectors capable of expressing NFIF polypeptides. Also included are methods and compositions for increasing NF&kgr;B induction in a patient, methods and compositions for lowering NF&kgr;B induction in a patient, methods for inhibiting inflammation, and methods for manufacutre of a medicament intended for the treatment and/or prevention of an NF&kgr;B-regulated inflammatory response. In addition, methods for determining whether a test compound inhibits or enhances the activity of NFIF polypeptides are provided.

Abstract: The invention features a probe for radiance dosimetry. The probe includes a tip portion containing a fluorescent dye connected to a translucent spacer element.