Patents by Inventor Thomas Hollerbach

Thomas Hollerbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240094648
    Abstract: Aspects of disclosure provide a method for attaching wiring connections to a component using both design and field measured data of the component to produce accurate wiring connections.
    Type: Application
    Filed: November 29, 2023
    Publication date: March 21, 2024
    Inventors: Uwe HOLLERBACH, Thomas L. LAIDIG
  • Patent number: 11934762
    Abstract: Systems and methods disclosed are generally related to masklessly developing connections between a chip-group and a design connection point on a substrate. In placement of the chip-group on the substrate, according to certain embodiments the chip-group may be dispositioned relative to an expected position per a substrate layout design, causing a connection misalignment with the design connection point. According to certain embodiments, a machine learning (ML) model is trained on historical and simulated pixel models of chip-group connections and design connection points. Upon determining the chip-group misalignment by a metrology measurement, the trained ML model determines a pixel model to connect the misaligned chip-group, and causes the pixel model to be exposed to a substrate with a digital lithography tool, thereby connecting the dispositioned chip-group to the design connection point.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: March 19, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Tamer Coskun, Aidyn Kemeldinov, Chung-Shin Kang, Uwe Hollerbach, Thomas L Laidig
  • Patent number: 7859684
    Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser bean is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.
    Type: Grant
    Filed: May 15, 2009
    Date of Patent: December 28, 2010
    Assignee: Carl Zeiss Meditec AG
    Inventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
  • Publication number: 20090326522
    Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser bean is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.
    Type: Application
    Filed: May 15, 2009
    Publication date: December 31, 2009
    Applicant: Carl Zeiss Meditec AG
    Inventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
  • Patent number: 7545515
    Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser beam is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.
    Type: Grant
    Filed: October 24, 2006
    Date of Patent: June 9, 2009
    Assignee: Carl Zeiss Meditec AG
    Inventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
  • Patent number: 7537591
    Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: May 26, 2009
    Assignee: Carl Zeiss Meditec AG
    Inventors: Torsten Feige, Claus Goder, Thomas Hollerbach
  • Publication number: 20070250049
    Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.
    Type: Application
    Filed: March 29, 2007
    Publication date: October 25, 2007
    Applicant: CARL ZEISS MEDITEC AG
    Inventors: Torsten Feige, Claus Goder, Thomas Hollerbach
  • Publication number: 20070161973
    Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser beam is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.
    Type: Application
    Filed: October 24, 2006
    Publication date: July 12, 2007
    Applicant: Carl Zeiss Meditec AG
    Inventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
  • Patent number: 7211078
    Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.
    Type: Grant
    Filed: May 17, 2001
    Date of Patent: May 1, 2007
    Assignee: Carl Zeiss Meditec AG
    Inventors: Torsten Feige, Claus Goder, Thomas Hollerbach
  • Patent number: 7128737
    Abstract: A device for figuring objects by means of material erosion of the surface thereof, comprising a pulsed laser beam and a deflection device through which the laser beam is directed at the object surface and via which the object surface is guided. The invention is suitable for figuring natural optical lenses made from a biological substance or artificial optical lenses. The inventive device is provided with an optical device to modify the distribution of the radiation intensity inside the laser beam cross section. The radiation intensity, once the laser beam has passed through the optical device, has a bell-shaped or Gaussian-like distribution in at least one cross sectional direction through the laser beam.
    Type: Grant
    Filed: October 20, 1990
    Date of Patent: October 31, 2006
    Assignee: Carl Zeiss Meditec AG
    Inventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
  • Publication number: 20040039377
    Abstract: The invention relates to a device and method for measuring the energy and/or the position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor which detects its energy and/or position.
    Type: Application
    Filed: November 14, 2002
    Publication date: February 26, 2004
    Inventors: Torsten Feige, Claus Goder, Thomas Hollerbach