Abstract: A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container to hold the substrates, a vacuum source having a portable power source, located on the cart and capable of generating a vacuum in the container, and a docking valve to mate with a corresponding valve on each of the processing chambers, where the docking valve and the corresponding valve are securable to one another to form a substantially vacuum-tight seal and openable, while mated, to permit unloading and loading of substrates between the container and the processing chamber. A method of using the system is also provided.

Abstract: Carbon monoxide (CO) is removed from a nitrogen and CO containing gas stream such as feed air to an air separation process for recovery of a nitrogen product gas stream or a nitrogen product gas stream from an air separation process by adsorbing CO from said gas stream before or after separation of oxygen from said gas stream to produce a product gas stream containing less than 5 ppb of CO by contacting said gas stream With a solid adsorbent such as a Mn, Fe, Ni, Cu, Ag, Pd, Co, Pt or Au exchanged zeolite and periodically regenerating the adsorbent by desorption of CO therefrom under a flow of regenerating gas, and, if said gas stream is said feed air, separating oxygen therefrom to produce said nitrogen product.

Abstract: A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container to hold the substrates, a vacuum source having a portable power source, located on the cart and capable of generating a vacuum in the container, and a docking valve to mate with a corresponding valve on each of the processing chambers, where the docking valve and the corresponding valve are securable to one another to form a substantially vacuum-tight seal and openable, while mated, to permit unloading and loading of substrates between the container and the processing chamber. A method of using the system is also provided.

Abstract: Fluorine is removed from exhaust gas coming from a cleaning, etching or CVD operation in semiconductor fabrication by passing the gas through a fixed bed of activated alumina having a high total pore volume while maintaining the fluorine level of the gas passing into the alumina bed at 4 volume percent or less. Nitrogen can be added to the exhaust gas to control fluorine concentration. Using alumina having an initial total pore volume above 0.35 cc/gm and limiting the fluorine level in the exhaust gas enables the fixed bed to operate without undue plugging or sintering.

Abstract: A process for destroying fluorine in a gas containing such fluorine by contacting the gas with a fluidized bed of metal particles capable of reacting with such fluorine wherein the metal particles have a particle size essentially no greater than approximately 300 microns. The process can be conducted in parallel connected switching fluidized beds wherein the beds are switched based upon achieving a predetermined bed height expansion based upon the reaction of the metal particles with such fluorine.

Abstract: A process for destroying NF.sub.3 in a gas containing NF.sub.3 by contacting the gas with a fluidized bed of metal particles capable of reacting with NF.sub.3 wherein the metal particles have a particle size essentially no greater than approximately 300 microns. The process can be conducted in parallel connected switching fluidized beds wherein the beds are switched based upon achieving a predetermined bed height expansion based upon the reaction of the metal particles with the NF.sub.3.

Abstract: Carbon dioxide, water, carbon monoxide and hydrogen are removed from a gas stream such as air or nitrogen by adsorbing water and carbon dioxide on a solid absorbent of alumina, or zeolite and oxiding carbon monoxide over a solid catalyst to carbon dioxide and adsorbing the resulting carbon dioxide and chemisorbing the hydrogen on the catalyst, which may be palladium on alumina.

Abstract: Carbon monoxide is removed from air prior to cryogenic separation of oxygen and nitrogen. Feed air is compressed and the heat of compression is used without further heating to drive catalytic oxidation of CO to CO.sub.2 over a Pd and/or Pt on alumina catalyst followed by adsorption of water initially present and then either adsorption of hydrogen or oxidation of hydrogen to water and its removal by adsorption, along with carbon dioxide.

Abstract: A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by first contacting the gas stream with a membrane system in one or more stages where the membrane(s) is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in diluent gas and retentate rich in fluorochemicals, thereafter subjecting retentate the gas stream to a purification by distillation or adsorption resulting in a product stream enriched in fluorochemicals and a purified diluent stream. The purified diluent stream is used as a purge stream and/or a recycle stream together with the permeate stream to a vacuum pump upstream of the membrane separation step.

Abstract: A process for removing parts-per-million quantities of unwanted species such as oxygen, carbon monoxide, hydrogen, carbon dioxide and water from a cryogenically produced nitrogen gas stream using an oxygen removal step prior to a nickel-based catalytic adsorption step in order to eliminate the need for hydrogen regeneration in either step. Ultrapure nitrogen heated to less than 500.degree. C. is used to purge and hold the beds used for unwanted species removal, eliminating the need for hydrogen regeneration thus reducing the regeneration cycle time and cost.

Abstract: A process for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane system in combination with an adsorption system, the adsorption system used either before or after the membrane system.

Abstract: An adsorbent and method for removing water from gaseous HCl. MgCl.sub.2 supported on an activated carbon or silica gel substrate activated by heating to a temperature between 150.degree. C. (302.degree. F.) and 300.degree. C. (572.degree. F.) under vacuum will remove water at partial pressures of below 0.5 torr. Activation of the MgCl.sub.2 supported adsorbent can also be effected by heating the adsorbent between 270.degree. C. (518.degree. F.) and 400.degree. C. (752.degree. F.) under nitrogen.

Abstract: Ultra-high purity hydrogen is produced from a hydrogen stream containing impurities including carbon monoxide and carbon dioxide, by first depleting the stream of carbon monoxide and carbon dioxide, than passing it through a semipermeable membrane such as a palladium-silver membrane, to remove methane, water and other impurities. Preferably, a methanation catalyst is used in the first step to convert the carbon monoxide and carbon dioxide to methane and water. This stream, free of carbon monoxide and carbon dioxide, is then passed through the semipermeable membrane to separate the remaining impurities.

Abstract: A method for regenerating a nickel-based catalytic adsorbent without using hydrogen in each cycle. Depending upon the configuration of the adsorbent bed, one or more interim regenerations, comprising the steps of heating the bed, flowing ultra-high purity nitrogen without hydrogen through the bed to remove adsorbed species, followed by cooling the bed, can be used to prepare the adsorbent bed for removal of unwanted species contained in cyrogenically produced nitrogen in order to make UHP nitrogen.

Abstract: Method and apparatus for removing trace levels of impurities from gases stored cryogenically in a storage vessel in liquid form by passing a vaporized portion of liquified gas from the storage vessel through a bed of adsorbent while using the liquified gas to cool the adsorbent. Vaporized gas resulting from cooling of the adsorbent with the stored liquified gas can be combined with the vapor withdrawn from the storage vessel prior to being passed through the bed of adsorbent. Liquified gas can be withdrawn from the storage vessel, vaporized and the vaporized gas combined with the vaporized gas from the storage vessel prior to being passed through the bed of adsorbent.

Abstract: A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane, comprising the steps of: compressing a gas stream containing a diluent gas and fluorochemicals to an elevated pressure; heating the gas stream containing a diluent gas and fluorochemicals to an elevated temperature sufficient to increase the flux of the permeate stream and to increase the selectivity of the membrane for the permeation of the diluent gas relative to the permeation of the fluorochemicals; contacting the gas stream with a membrane which is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in the diluent gas and a retentate rich in fluorochemicals; contacting the gas stream with one or more additional membranes which are selectively more permeable to the diluent gas than the fluorochemicals to result in a second permeate stream rich in the diluent gas and a second retentate

Abstract: The present invention is directed to two embodiments of a process for recycling an impure argon effluent from a silicon crystal growing furnace using cryogenics. The first embodiment uses cryogenic distillation techniques, and the second embodiment uses cryogenic adsorption, both of which use catalytic treatments and adsorption in conjunction with their cryogenic process steps to provide a pure argon recycle stream for a silicon crystal growth furnace.