Patents by Inventor Thomas Huelsmann

Thomas Huelsmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10219391
    Abstract: A method for pretreating a copper surface for the subsequent formation of a firmly adhesive bond between the copper surface and a plastic material substrate. The method comprises bringing a copper surface into contact with: a) hydrogen peroxide; b) an acid; c) a nitrogen-containing, five-membered, heterocyclic compound; and d) a lactam, amide, or polyamide, connected at one or more of its nitrogen atoms with at least one residue of formula (I), wherein: n is an integer from 1 to 100; R1 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; R2 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; and each R1 and R2 in a —(CHR1—CHR2—O)— moiety is selected independently of each R1 and R2 in another —(CHR1—CHR2—O)— moiety.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: February 26, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Christian Sparing, Thomas Huelsmann, Arno Clicque, Patrick Brooks, Adrian Zee, Heiko Brunner
  • Patent number: 9824909
    Abstract: A chuck for aligning a first planar substrate in parallel to a second planar substrate includes a top plate having a top surface for arrangement of the first planar substrate. A bottom plate is at least one distance measuring sensor configured to measure a distance between the top surface of the top plate and a surface of the second planar substrate, and at least three linear actuators in contact with the top plate and the bottom plate. The method for setting a gap between the first and second planar substrate includes measuring the thickness of the first planar substrate and measuring between a surface of the second planar substrate and the top surface of the top plate. The tilt adjusts between a top surface of the first planar substrate or the chuck and the surface of the second planar substrate by using at least three linear actuators of the chuck.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: November 21, 2017
    Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
    Inventors: Sven Hansen, Thomas Huelsmann, Katrin Schindler
  • Publication number: 20170086305
    Abstract: A method for pretreating a copper surface for the subsequent formation of a firmly adhesive bond between the copper surface and a plastic material substrate. The method comprises bringing a copper surface into contact with: a) hydrogen peroxide; b) an acid; c) a nitrogen-containing, five-membered, heterocyclic compound; and d) a lactam, amide, or polyamide, connected at one or more of its nitrogen atoms with at least one residue of formula (I), wherein: n is an integer from 1 to 100; R1 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; R2 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; and each R1 and R2 in a —(CHR1—CHR2—O)— moiety is selected independently of each R1 and R2 in another —(CHR1—CHR2—O)— moiety.
    Type: Application
    Filed: October 5, 2016
    Publication date: March 23, 2017
    Inventors: Christian SPARING, Thomas HUELSMANN, Arno CLICQUE, Patrick BROOKS, Adrian ZEE, Heiko BRUNNER
  • Patent number: 9504161
    Abstract: The invention concerns a solution for pretreating copper surfaces, and a method for pre-treating copper surfaces allowing the formation of a tight bond to plastic substrates. The solution comprises: a) hydrogen peroxide, b) at least one acid, and c) at least one nitrogen-containing, five-membered, heterocyclic compound, and d) additionally at least one nitrogen containing, adhesion-promoting compound, said compound comprising, or consisting of, lactams, non-quaternary fatty amines, amides and polyamides, connected at one or more of its nitrogen atoms with at least one residue of formula (I).
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: November 22, 2016
    Assignee: ATOTECH DEUTSCHLAND GMBH
    Inventors: Christian Sparing, Thomas Huelsmann, Arno Clicque, Patrick Brooks, Adrian Zee, Heiko Brunner
  • Publication number: 20150294890
    Abstract: The chuck for aligning a first planar substrate, e.g., a wafer, in parallel to a second planar substrate, e.g. a mask, comprises: a top plate having a top surface for arrangement of the first planar substrate, a bottom plate, at least one distance measuring sensor configured to measure a distance between the top surface of the top plate and a surface of the second planar substrate, and at least three linear actuators in contact with the top plate and the bottom plate. The method for setting a gap between a first planar substrate, e.g. a wafer, on a top plate of a chuck, and a second planar substrate, e.g.
    Type: Application
    Filed: December 4, 2013
    Publication date: October 15, 2015
    Inventors: Sven HANSEN, Thomas HUELSMANN, Katrin SCHINDLER
  • Publication number: 20140141169
    Abstract: The present invention relates to a method for increasing the adhesion of organic resist materials on copper or copper alloy surfaces. The copper or copper alloy surface is contacted with an aqueous adhesion promoting solution comprising at least one organic acid, a peroxide compound and optionally one or more substances selected from the group consisting of urea, derivatives thereof and water-soluble polymers.
    Type: Application
    Filed: June 29, 2012
    Publication date: May 22, 2014
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Thomas Huelsmann, Arno Clicque, Dirk Tews, Mirko Kloppisch, Andry Liong
  • Publication number: 20140076461
    Abstract: The invention concerns a solution for pretreating copper surfaces, and a method for pre-treating copper surfaces allowing the formation of a tight bond to plastic substrates. The solution comprises: a) hydrogen peroxide, b) at least one acid, and c) at least one nitrogen-containing, five-membered, heterocyclic compound, and d) additionally at least one nitrogen containing, adhesion-promoting compound, said compound comprising, or consisting of, lactams, non-quaternary fatty amines, amides and polyamides, connected at one or more of its nitrogen atoms with at least one residue of formula (I).
    Type: Application
    Filed: October 24, 2011
    Publication date: March 20, 2014
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Christian Sparing, Thomas Huelsmann, Arno Clicque, Patrick Brooks, Adrian Zee, Heiko Brunner
  • Publication number: 20120037312
    Abstract: The present invention relates to a process for manufacture of multilayer printed circuit boards and articles formed thereby, especially IC substrates. The inventive process utilizes in individual process steps inorganic silicates and organosilane bonding mixtures to provide adhesion between layers of copper and dielectric materials. Said process leads to an enhanced adhesive strength, improved mechanical and thermal stress resistance as well as humidity resistance of multilayer printed circuit boards and IC substrates.
    Type: Application
    Filed: April 15, 2010
    Publication date: February 16, 2012
    Inventors: Christian Sparing, Thomas Huelsmann, Patrick Brooks, Arno Clicque
  • Patent number: 6373272
    Abstract: The present invention provides an apparatus for the testing of semiconductor structures. The apparatus is provided with a chuck for holding a semiconductor wafer and with needle holders for contact needles, the chuck being provided with a fastening device for the semiconductor wafer and being movable for positioning, controlled using a positioning device, in relation to the contact needles. The object of the present invention is to detect faults, in good time and reliably, of non-serviceable or not fully serviceable chips before separation to avoid unnecessary work for separating and assembling defective chips. The object is attained in that the chuck has a receiving area exposing upwards a lower surface of the semiconductor wafer and a receiving plane therefor. The receiving plane is arranged above the needle carrier, and the contact needles point upwards in such a manner that they contact contact islands of the semiconductor chips on the downwardly directed upper surface of the semiconductor wafer.
    Type: Grant
    Filed: September 16, 1998
    Date of Patent: April 16, 2002
    Assignee: Karl Suss Dresden GmbH
    Inventors: Reinhard Welsch, Claus Dietrich, Thomas Huelsmann, Dietmar Runge