Patents by Inventor Thomas Ihl

Thomas Ihl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same
    Patent number: 8279402
    Abstract: An optical arrangement for immersion lithography, having at least one component (1) to which a hydrophobic coating (6, 7) is applied, the hydrophobic coating (6, 7) being exposed to UV radiation during operation of a projection lens, and the at least one component (1) being wetted at least in part by an immersion fluid during operation of the projection lens. The hydrophobic coating (6, 7) includes at least one UV-resistant layer (6) that absorbs and/or reflects UV radiation at a wavelength of less than 260 nm.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: October 2, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stephan Six, Michael Lill, Ruediger Duesing, Bernhard Gellrich, Michael Widmann, Andreas Schubert, Tilmann Von Papen, Thomas Ihl
  • OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC COATING, AS WELL AS PROJECTION EXPOSURE APPARATUS COMPRISING THE SAME
    Publication number: 20090233233
    Abstract: An optical arrangement for immersion lithography, having at least one component (1) to which a hydrophobic coating (6, 7) is applied, the hydrophobic coating (6, 7) being exposed to UV radiation during operation of a projection lens, and the at least one component (1) being wetted at least in part by an immersion fluid during operation of the projection lens. The hydrophobic coating (6, 7) includes at least one UV-resistant layer (6) that absorbs and/or reflects UV radiation at a wavelength of less than 260 nm.
    Type: Application
    Filed: March 12, 2009
    Publication date: September 17, 2009
    Applicant: Carl Zeiss SMT AG
    Inventors: Stephan SIX, Michael Lill, Ruediger Duesing, Bernhard Gellrich, Michael Widmann, Andreas Schubert, Tilmann Von Papen, Thomas Ihl