Abstract: An optical position-measuring device includes a measuring standard having a first grating in a form of a periodic incremental graduation and an absolute mark. A scanning unit is displaceable relative to the measuring standard in a measuring direction. The scanning unit has at least one second grating disposed at a scanning distance from the first grating. A first detector array is configured to obtain a first scanning signal for purposes of position determination in which the gratings are illuminated with light of a first wavelength. A second detector array is configured to obtain a second scanning signal for purposes of position determination in which the absolute mark is illuminated with light of a second wavelength. The first wavelength is shorter than the second wavelength.

Abstract: An optical position-measuring device includes a measuring standard having a first grating in a form of a periodic incremental graduation and an absolute mark. A scanning unit is displaceable relative to the measuring standard in a measuring direction. The scanning unit has at least one second grating disposed at a scanning distance from the first grating. A first detector array is configured to obtain a first scanning signal for purposes of position determination in which the gratings are illuminated with light of a first wavelength. A second detector array is configured to obtain a second scanning signal for purposes of position determination in which the absolute mark is illuminated with light of a second wavelength. The first wavelength is shorter than the second wavelength.

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.