Abstract: The invention relates to a method of using a thermal laser evaporation (TLE) system. The TLE system comprises a reaction chamber fillable with a reaction atmosphere. A substrate is arranged in the reaction chamber, and one or more sources are arranged in the reaction chamber. Each source comprises a source element having a source material, and a laser source for providing a heating laser beam impinging with a heating spot on a top surface of the source element, thereby evaporating or sublimating the source material from an active area on the top surface of the source element. This provides a flux of evaporated or sublimated source material for a deposition onto the substrate.

Abstract: A pressure chamber has a chamber wall. The chamber wall includes a sensor integrated within the chamber wall, wherein the sensor integrated in the chamber wall comprises defects. A method of determining an effect of pressure on a material is further described. The method includes applying pressure to a material within a pressure chamber and to a pressure chamber wall of the pressure chamber, where the pressure chamber wall has defects. A signal from the defects is sensed while the material and the pressure chamber wall are under pressure. A property of the material is determined based on the sensed signal.

Abstract: A pressure chamber has a chamber wall. The chamber wall includes a sensor integrated within the chamber wall, wherein the sensor integrated in the chamber wall comprises defects. A method of determining an effect of pressure on a material is further described. The method includes applying pressure to a material within a pressure chamber and to a pressure chamber wall of the pressure chamber, where the pressure chamber wall has defects. A signal from the defects is sensed while the material and the pressure chamber wall are under pressure. A property of the material is determined based on the sensed signal.