Abstract: A semiconductor device include a first semiconductor layer with a first doping concentration. A second semiconductor layer has a second doping concentration and has a first surface and a second opposing surface. The second doping concentration is higher than the first doping concentration. The first surface of the second semiconductor layer is in contact with the first semiconductor layer. A contact is on the second surface of the second semiconductor layer. The contact includes a metal and a semiconductor.

Abstract: A via is formed on a wafer to lie within an opening in a non-conductive structure and make an electrical connection with an underlying conductive structure so that the entire top surface of the via is substantially planar, and lies substantially in the same plane as the top surface of the non-conductive structure. The substantially planar top surface of the via enables a carbon nanotube switch to be predictably and reliably closed.

Abstract: A via is formed on a wafer to lie within an opening in a non-conductive structure and make an electrical connection with an underlying conductive structure so that the entire top surface of the via is substantially planar, and lies substantially in the same plane as the top surface of the non-conductive structure. The substantially planar top surface of the via enables a carbon nanotube switch to be predictably and reliably closed.

Abstract: A system and method are disclosed for manufacturing an integrated circuit anti-fuse in conjunction with a tungsten plug process. A tungsten plug is formed in a dielectric layer that overlies a portion of P type silicon and an adjacent portion of N type silicon. The dielectric layer is etched to create a first anti-fuse contact opening down to the underlying P type silicon and a second anti-fuse contact opening down to the underlying N type silicon. A metal layer is deposited over the tungsten plug and over the dielectric layer and etched to form an anti-fuse metal contact in each of two anti-fuse contact openings. A bias voltage is applied to the anti-fuse metal contacts to activate the anti-fuse.

Abstract: A system and method are disclosed for manufacturing an integrated circuit anti-fuse in conjunction with a tungsten plug process. A tungsten plug is formed in a dielectric layer that overlies a portion of P type silicon and an adjacent portion of N type silicon. The dielectric layer is etched to create a first anti-fuse contact opening down to the underlying P type silicon and a second anti-fuse contact opening down to the underlying N type silicon. A metal layer is deposited over the tungsten plug and over the dielectric layer and etched to form an anti-fuse metal contact in each of two anti-fuse contact openings. A bias voltage is applied to the anti-fuse metal contacts to activate the anti-fuse.