Patents by Inventor Thomas Lee Frederick

Thomas Lee Frederick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METAL-OXIDE VARISTOR (MOV) BASED SURGE PROTECTION CIRCUIT FOR PLASMA PROCESSING CHAMBER
    Publication number: 20250379032
    Abstract: A system includes a chamber configured to produce and contain a plasma. The system includes a transmission line positioned in the chamber. The transmission line includes a transmission line input and includes an output coupled to a common potential. The system includes a signal source coupled to the transmission line input to feed an input signal to the transmission line. The system includes a surge protection circuit coupled between the transmission line input and the common potential. An impedance of the surge protection circuit is inversely related to a voltage level at the transmission line input.
    Type: Application
    Filed: May 31, 2023
    Publication date: December 11, 2025
    Applicant: Lam Research Corporation
    Inventors: Ali FROTANPOUR, Thomas Lee FREDERICK
  • Impedance transformation in radio-frequency-assisted plasma generation
    Patent number: 12394601
    Abstract: An apparatus for providing signals to a device may include one or more radiofrequency signal generators, and electrically-small transmission line, which couples signals from the one or more RF signal generators to the fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
    Type: Grant
    Filed: April 10, 2024
    Date of Patent: August 19, 2025
    Assignee: Lam Research Corporation
    Inventors: Eller Y. Juco, Thomas Lee Frederick, Karl Frederick Leeser, Paul Konkola
  • RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL
    Publication number: 20240347400
    Abstract: Methods and apparatus for measuring current are disclosed.
    Type: Application
    Filed: June 24, 2024
    Publication date: October 17, 2024
    Inventors: Sunil Kapoor, Thomas Lee Frederick
  • IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
    Publication number: 20240258073
    Abstract: An apparatus for providing signals to a device may include one or more radiofrequency signal generators, and electrically-small transmission line, which couples signals from the one or more RF signal generators to the fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
    Type: Application
    Filed: April 10, 2024
    Publication date: August 1, 2024
    Inventors: Eller Y. Juco, Thomas Lee Frederick, Karl Frederick Leeser, Paul Konkola
  • Impedance transformation in radio-frequency-assisted plasma generation
    Patent number: 11984298
    Abstract: An apparatus for providing signals to a device may include one or more radio frequency signal generators, and electrically-small transmission line, which coupled signals from the one or more RF signal generators to a fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: May 14, 2024
    Assignee: Lam Research Corporation
    Inventors: Eller Y. Juco, Thomas Lee Frederick, Karl Frederick Leeser, Paul Konkola
  • IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
    Publication number: 20220415616
    Abstract: An apparatus for providing signals to a device may include one or more radiofrequency signal generators, and electrically-small transmission line, which couples signals from the one or more RF signal generators to the fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
    Type: Application
    Filed: December 2, 2020
    Publication date: December 29, 2022
    Applicant: Lam Research Corporation
    Inventors: Eller Y. Juco, Thomas Lee Frederick, Karl Frederick Leeser, Paul Konkola