Patents by Inventor Thomas Letson

Thomas Letson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10236356
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: March 19, 2019
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20170365677
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: August 9, 2017
    Publication date: December 21, 2017
    Inventors: Uday SHAH, Brian S. DOYLE, Justin K. BRASK, Robert S. CHAU, Thomas A. LETSON
  • Patent number: 9741809
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: September 16, 2015
    Date of Patent: August 22, 2017
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20160005829
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: September 16, 2015
    Publication date: January 7, 2016
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 9190518
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: November 17, 2015
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20140239358
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: May 8, 2014
    Publication date: August 28, 2014
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 8749026
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: June 10, 2014
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20130264642
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: June 3, 2013
    Publication date: October 10, 2013
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 8502351
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: August 6, 2013
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20120012934
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: September 23, 2011
    Publication date: January 19, 2012
    Inventors: Uday Shah, Brian Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 8067818
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: November 29, 2011
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Publication number: 20110062512
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: November 24, 2010
    Publication date: March 17, 2011
    Inventors: Uday Shah, Brian Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 7821044
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Grant
    Filed: January 15, 2008
    Date of Patent: October 26, 2010
    Assignee: Intel Corporation
    Inventors: Mark T. Bohr, Steven J. Keating, Thomas A. Letson, Anand S. Murthy, Donald W. O'Neill, Willy Rachmady
  • Patent number: 7550333
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: June 23, 2009
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 7494858
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: February 24, 2009
    Assignee: Intel Corporation
    Inventors: Mark T. Bohr, Steven J. Keating, Thomas A. Letson, Anand S. Murthy, Donald W. O'Neill, Willy Rachmady
  • Publication number: 20080135894
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Application
    Filed: January 15, 2008
    Publication date: June 12, 2008
    Inventors: Mark T. Bohr, Steven J. Keating, Thomas A. Letson, Anand S. Murthy, Donald W. O'Neill, Willy Rachmady
  • Patent number: 7208399
    Abstract: A transistor having a gate electrode with a T-shaped cross section is fabricated from a single layer of conductive material using an etching process. A two process etch is performed to form side walls having a notched profile. The notches allow source and drain regions to be implanted in a substrate and thermally processed without creating excessive overlap capacitance with the gate electrode. The reduction of overlap capacitance increases the operating performance of the transistor, including drive current.
    Type: Grant
    Filed: July 22, 2004
    Date of Patent: April 24, 2007
    Assignee: Intel Corporation
    Inventors: Charles Chu, Thomas A. Letson
  • Publication number: 20070004123
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Application
    Filed: June 30, 2005
    Publication date: January 4, 2007
    Inventors: Mark Bohr, Steven Keating, Thomas Letson, Anand Murthy, Donald O'Neill, Willy Rachmady
  • Publication number: 20060214231
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: May 23, 2006
    Publication date: September 28, 2006
    Inventors: Uday Shah, Brian Doyle, Justin Brask, Robert Chau, Thomas Letson
  • Publication number: 20060086977
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Application
    Filed: October 25, 2004
    Publication date: April 27, 2006
    Inventors: Uday Shah, Brian Doyle, Justin Brask, Robert Chau, Thomas Letson