Patents by Inventor Thomas Madar

Thomas Madar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support including purge ring having inner edge aligned to wafer edge
    Patent number: 6521292
    Abstract: The present invention provides exemplary apparatus and methods for processing substrates and for ensuring purge gases reach the substrate edge, including edges of JMF type wafers, to help prevent unwanted deposition thereon. One embodiment provides an apparatus for processing substrates which includes a chamber and a substrate support (13) disposed in the chamber. An edge ring (15) is disposed on the substrate support. The edge ring has a lip portion (30) which at least partially overhangs an upper surface (36) of the substrate support to define a gap (29) between the lip portion and the upper surface. In this manner, the edge ring is designed to form a gap which properly directs purge gases to edges of the substrate, including JMF type substrates.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: February 18, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Salvador Umotoy, Thomas Madar