Patents by Inventor Thomas McCarroll Shaw
Thomas McCarroll Shaw has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10755404Abstract: Techniques that facilitate integrated circuit defect detection using pattern images are provided. In one example, a system generates an equalized pattern image of a pattern image associated with a module under test based on an adaptive contrast equalization technique. The system also identifies a first set of features of the equalized pattern image based on a feature point detection technique and aligns the equalized pattern image with a reference pattern image based on the first set of features and a second set of features of the reference pattern image. Furthermore, the system compares a first set of light intensities of the equalized pattern image to a second set of light intensities of the reference pattern image to identify one or more regions of the module under test that satisfy a defined criterion associated with a defect for the module under test.Type: GrantFiled: December 7, 2017Date of Patent: August 25, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chung-Ching Lin, Thomas McCarroll Shaw, Peilin Song, Franco Stellari, Thomas Anthony Wassick
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Publication number: 20190180430Abstract: Techniques that facilitate integrated circuit defect detection using pattern images are provided. In one example, a system generates an equalized pattern image of a pattern image associated with a module under test based on an adaptive contrast equalization technique. The system also identifies a first set of features of the equalized pattern image based on a feature point detection technique and aligns the equalized pattern image with a reference pattern image based on the first set of features and a second set of features of the reference pattern image. Furthermore, the system compares a first set of light intensities of the equalized pattern image to a second set of light intensities of the reference pattern image to identify one or more regions of the module under test that satisfy a defined criterion associated with a defect for the module under test.Type: ApplicationFiled: December 7, 2017Publication date: June 13, 2019Inventors: Chung-Ching Lin, Thomas McCarroll Shaw, Peilin Song, Franco Stellari, Thomas Anthony Wassick
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Patent number: 7745863Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: GrantFiled: June 26, 2008Date of Patent: June 29, 2010Assignee: International Business Machines CorporationInventors: James W. Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Publication number: 20090304951Abstract: A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.Type: ApplicationFiled: August 17, 2009Publication date: December 10, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Christos Dimitrios Dimitrakopoulos, Stephen McConnell Gates, Alfred Grill, Michael Wayne Lane, Eric Gerhard Liniger, Xiao Hu Liu, Son Van Nguyen, Deborah Ann Neumayer, Thomas McCarroll Shaw
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Publication number: 20090098728Abstract: The disclosed method forms a via between metallization layers in a semiconductor structure by patterning an insulator layer overlying a first metallization layer to include a via opening. The method lines the via opening with TaN and Ta liners and then sputter etches the via opening deeper through the TaN and Ta liners into the first metallization layer. After sputter etching, the method then lines the via opening with second TaN and Ta liners. Next, the method deposits a conductor into the via opening, thereby connecting the first and second metallization layers.Type: ApplicationFiled: October 11, 2007Publication date: April 16, 2009Inventors: Stephan Grunow, Thomas McCarroll Shaw, Andrew H. Simon, Chih-Chao Yang, Tiblor Bolom, James Werking
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Publication number: 20080286494Abstract: A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.Type: ApplicationFiled: March 7, 2008Publication date: November 20, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Christos Dimitrios Dimitrakopoulos, Stephen McConnell Gates, Alfred Grill, Michael Wayne Lane, Eric Gerhard Liniger, Xiao Hu Liu, Son Van Nguyen, Deborah Ann Neumayer, Thomas McCarroll Shaw
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Publication number: 20080258194Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: ApplicationFiled: June 26, 2008Publication date: October 23, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Patent number: 7402857Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: GrantFiled: March 16, 2007Date of Patent: July 22, 2008Assignee: International Business Machines CorporationInventors: James W. Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Patent number: 7357977Abstract: A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.Type: GrantFiled: January 13, 2005Date of Patent: April 15, 2008Assignee: International Business Machines CorporationInventors: Christos Dimitrios Dimitrakopoulos, Stephen McConnell Gates, Alfred Grill, Michael Wayne Lane, Eric Gerhard Liniger, Xiao Hu Liu, Son Van Nguyen, Deborah Ann Neumayer, Thomas McCarroll Shaw
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Patent number: 7217969Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: GrantFiled: March 7, 2003Date of Patent: May 15, 2007Assignee: International Business Machines CorporationInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Patent number: 7186573Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: GrantFiled: October 31, 2005Date of Patent: March 6, 2007Assignee: International Business Machines CorporationInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Patent number: 6773982Abstract: An integrated ferroelectric/CMOS structure which comprises at least a ferroelectric material, a pair of electrodes in contact with opposite surfaces of the ferroelectric material, where the electrodes do not decompose at deposition or annealing, and an oxygen source layer in contact with at least one of said electrodes, said oxygen source layer being a metal oxide which at least partially decomposes during deposition and/or subsequent processing is provided as well as a method of fabricating the same.Type: GrantFiled: August 10, 2001Date of Patent: August 10, 2004Assignee: International Business Machines CorporationInventors: Charles Thomas Black, Cyril Cabral, Jr., Alfred Grill, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Publication number: 20030155598Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: ApplicationFiled: March 7, 2003Publication date: August 21, 2003Applicant: International Business Machines CorporationInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Publication number: 20030085447Abstract: An IC including a resistor which is coupled to a metal wiring level through metal contacts, said resistor including a discrete metal-insulator-metal stack, wherein said metal contacts are in contact to one of said metals of said film stack. In the above IC design, current flows laterally through either the top metal electrode, the bottom metal electrode, or both, and any unused electrode is disconnected from the circuit.Type: ApplicationFiled: December 16, 2002Publication date: May 8, 2003Applicant: International Business Machines CorporationInventors: Peter Richard Duncombe, Daniel Charles Edelstein, Robert Benjamin Laibowitz, Deborah Ann Neumayer, Tak Hung Ning, Robert Rosenberg, Thomas McCarroll Shaw
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Patent number: 6555859Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: GrantFiled: August 8, 2001Date of Patent: April 29, 2003Assignee: International Business Machines CorporationInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Patent number: 6503641Abstract: An electrical conductor for use in an electronic structure is disclosed which includes a conductor body that is formed of an alloy including between about 0.001 atomic % and about 2 atomic % of an element selected from the group consisting of Ti, Zr, In, Sn and Hf; and a liner abutting the conductor body which is formed of an alloy that includes Ta, W, Ti, Nb and V. The invention further discloses a liner for use in a semiconductor interconnect that is formed of a material selected from the group consisting of Ti, Hf, In, Sn, Zr and alloys thereof, TiCu3, Ta1−XTix, Ta1−X, Hfx, Ta1−X, Inxy, Ta1−XSnx, Ta1−XZrx.Type: GrantFiled: December 18, 2000Date of Patent: January 7, 2003Assignee: International Business Machines CorporationInventors: Cyril Cabral, Jr., Roy Arthur Carruthers, James McKell Edwin Harper, Chao-Kun Hu, Kim Yang Lee, Ismail Cevdet Noyan, Robert Rosenberg, Thomas McCarroll Shaw
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Publication number: 20020074581Abstract: An integrated ferroelectric/CMOS structure which comprises at least a ferroelectric material, a pair of electrodes in contact with opposite surfaces of the ferroelectric material, where the electrodes do not decompose at deposition or annealing, and an oxygen source layer in contact with at least one of said electrodes, said oxygen source layer being a metal oxide which at least partially decomposes during deposition and/or subsequent processing is provided as well as a method of fabricating the same.Type: ApplicationFiled: August 10, 2001Publication date: June 20, 2002Applicant: International Business Machines CorporationInventors: Charles Thomas Black, Cyril Cabral, Alfred Grill, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Publication number: 20020076574Abstract: An electrical conductor for use in an electronic structure is disclosed which includes a conductor body that is formed of an alloy including between about 0.001 atomic % and about 2 atomic % of an element selected from the group consisting of Ti, Zr, In, Sn and Hf; and a liner abutting the conductor body which is formed of an alloy that includes Ta, W, Ti, Nb and V. The invention further discloses a liner for use in a semiconductor interconnect that is formed of a material selected from the group consisting of Ti, Hf, In, Sn, Zr and alloys thereof, TiCu3, Ta1−XTix, Ta1−XHfx, Ta1−XInxy, Ta1−XSnx, Ta1−XZrx.Type: ApplicationFiled: December 18, 2000Publication date: June 20, 2002Applicant: International Business Machines CorporationInventors: Cyril Cabral, Roy Arthur Carruthers, James McKell Edwin Harper, Chao-Kun Hu, Kim Yang Lee, Ismail Cevdet Noyan, Robert Rosenberg, Thomas McCarroll Shaw
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Patent number: 6388285Abstract: An integrated ferroelectric/CMOS structure which comprises at least a ferroelectric material, a pair of electrodes in contact with opposite surfaces of the ferroelectric material, where the electrodes do not decompose at deposition or annealing, and an oxygen source layer in contact with at least one of said electrodes, said oxygen source layer being a metal oxide which at least partially decomposes during deposition and/or subsequent processing is provided as well as a method of fabricating the same.Type: GrantFiled: June 4, 1999Date of Patent: May 14, 2002Assignee: International Business Machines CorporationInventors: Charles Thomas Black, Cyril Cabral, Jr., Alfred Grill, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw
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Publication number: 20020028549Abstract: A method of forming an integrated ferroelectric/CMOS structure which effectively separates incompatible high temperature deposition and annealing processes is provided. The method of the present invention includes separately forming a CMOS structure and a ferroelectric delivery wafer. These separate structures are then brought into contact with each and the ferroelectric film of the delivery wafer is bonded to the upper conductive electrode layer of the CMOS structure by using a low temperature anneal step. A portion of the delivery wafer is then removed providing an integrated FE/CMOS structure wherein the ferroelectric capacitor is formed on top of the CMOS structure. The capacitor is in contact with the transistor of the CMOS structure through all the wiring levels of the CMOS structure.Type: ApplicationFiled: August 8, 2001Publication date: March 7, 2002Applicant: International Business Machines CorporationInventors: James William Adkisson, Charles Thomas Black, Alfred Grill, Randy William Mann, Deborah Ann Neumayer, Wilbur David Pricer, Katherine Lynn Saenger, Thomas McCarroll Shaw