Abstract: A composition and method using same useful for etching a semiconductor substrate comprising: from about 25 to 86% by weight of water; from about 0 to about 60% by weight of a water-miscible organic solvent; from about 1 to about 30% by weight of a base comprising a quartenary ammonium compound; from about 1 to about 50% by weight of an amine compound wherein the amine compound is selected from the group consisting of a secondary amine, a tertiary amine, and mixtures thereof; from about 0 to about 5% by weight of a buffering agent; from about 0 to about 15% by weight of a corrosion inhibitor.

Abstract: A composition and method using same useful for etching a semiconductor substrate comprising: from about 25 to 86% by weight of water; from about 0 to about 60% by weight of a water-miscible organic solvent; from about 1 to about 30% by weight of a base comprising a quartenary ammonium compound; from about 1 to about 50% by weight of an amine compound wherein the amine compound is selected from the group consisting of a secondary amine, a tertiary amine, and mixtures thereof; from about 0 to about 5% by weight of a buffering agent; from about 0 to about 15% by weight of a corrosion inhibitor.

Abstract: A method and apparatus for discharging a temperature-controlled flow of a resultant fluid (32) containing a throttling gas and cryogenic fluid onto a material (14) for the purpose of maintaining the temperature of the material within a desired temperature range and below the glass transition temperature of the material during machining. Also disclosed is an apparatus and method for deburring or deflashing a machined material by discharging a temperature-controlled flow of a resultant fluid (132) onto a machined material (114) to harden the burrs (134a), then brushing the material (114) to remove the hardened burrs (143a).

Abstract: A method and apparatus for discharging a temperature-controlled flow of a resultant fluid (32) containing a throttling gas and cryogenic fluid onto a material (14) for the purpose of maintaining the temperature of the material within a desired temperature range and below the glass transition temperature of the material during machining. Also disclosed is an apparatus and method for deburring or deflashing a machined material by discharging a temperature-controlled flow of a resultant fluid (132) onto a machined material (114) to harden the burrs (134a), then brushing the material (114) to remove the hardened burrs (143a).

Abstract: A catalyst composition which comprises a crystalline metallosilicate having the structure of zeolite Beta, phosphor and a matrix that is substantially free of crystalline aluminum phosphate which has improved resistance to steam deactivation which has higher cracking activity than analogous catalysts prepared without phosphorus. The crystalline metallosilicate be used in the as-synthesized form or in the calcined form. included is the method to produce the catalyst composition and methods for the use of catalysts prepared by the present method in organic conversion processes. Specific embodiments of the invention involve various techniques for preparation of catalyst containing phosphorus and crystalline metallosilicates having the structure of zeolite Beta. Catalysts prepared according to the method of this invention are useful for organic compound, e.g., hydrocarbon compound, conversion processes. Organic compound conversion processes include cracking, hydrocracking, and transalkylation, among others.

Abstract: A catalyst composition which comprises a crystalline metallosilicate having the structure of zeolite Beta, phosphorus, and a matrix that is substantially free of crystalline aluminum phosphate which has improved resistance to steam deactivation and which has higher cracking activity than analogous catalysts prepared without phosphorus. The crystalline metallosilicate may be used in the as-synthesized form or in the calcined form. Also included is the method to produce the catalyst composition and methods for the use of catalysts prepared by the present method in organic conversion processes. Specific embodiments of the invention involve various techniques for preparation of catalysts containing phosphorus and crystalline metallosilicates having the structure of zeolite Beta. Catalysts prepared according to the method of this invention are useful for organic compound, e.g., hydrocarbon compound, conversion processes.