Patents by Inventor Thomas Melde
Thomas Melde has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 12557330Abstract: Disclosed are embodiments of a semiconductor device and method of forming the device. The device includes a gate with first and second sections on a semiconductor layer. The first section includes first gate dielectric and gate conductor layers and an optional additional gate conductor layer on the first gate conductor layer. The second section includes second gate dielectric and gate conductor layers on the semiconductor layer and further extending onto the top of the first gate conductor layer. The second gate dielectric layer is thinner than the first gate dielectric layer. A gate sidewall spacer is on the first gate conductor layer positioned laterally to a sidewall of the second section (e.g., between the sidewall and the optional additional gate conductor layer). The first and second sections are either electrically connected for biasing with the gate bias voltage or electrically isolated for biasing with different gate bias voltages.Type: GrantFiled: March 28, 2023Date of Patent: February 17, 2026Assignee: GlobalFoundries U.S. Inc.Inventors: Thomas Melde, Ralf Richter, Stefan Dünkel
-
Publication number: 20250133735Abstract: A non-volatile memory structure includes a semiconductor substrate and first and second memory devices on the semiconductor substrate. Each of the first and second memory devices includes a floating gate, a tunnelling insulator under the floating gate, an isolation layer over the floating gate, and at least one of a select gate and a control gate over the isolation layer. The non-volatile memory structure further includes an erase gate shared by the first and second memory devices, a source region under the erase gate, and a shallow trench isolation structure between the erase gate and the source region. The shallow trench isolation structure increases the number of write/erase cycles that can be performed by the non-volatile memory structure.Type: ApplicationFiled: October 18, 2023Publication date: April 24, 2025Inventors: Nicki Nico MIKA, Tom Herrmann, Thomas Melde
-
Patent number: 12205633Abstract: Structures herein include an array of non-volatile memory cells. The non-volatile memory cells include memory bit cells and at least one reference bit cell that is adjacent the memory bit cells. These structures also include at least one reference voltage regulator connected to the reference bit cell, and at least one sense amplifier connected to the memory bit cells and the reference voltage regulator.Type: GrantFiled: June 14, 2022Date of Patent: January 21, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: Venkatesh P. Gopinath, Xiaoli Hu, Thomas Melde, Nicki N. Mika
-
Publication number: 20240332417Abstract: Disclosed are embodiments of a semiconductor device and method of forming the device. The device includes a gate with first and second sections on a semiconductor layer. The first section includes first gate dielectric and gate conductor layers and an optional additional gate conductor layer on the first gate conductor layer. The second section includes second gate dielectric and gate conductor layers on the semiconductor layer and further extending onto the top of the first gate conductor layer. The second gate dielectric layer is thinner than the first gate dielectric layer. A gate sidewall spacer is on the first gate conductor layer positioned laterally to a sidewall of the second section (e.g., between the sidewall and the optional additional gate conductor layer). The first and second sections are either electrically connected for biasing with the gate bias voltage or electrically isolated for biasing with different gate bias voltages.Type: ApplicationFiled: March 28, 2023Publication date: October 3, 2024Inventors: Thomas Melde, Ralf Richter, Stefan Dünkel
-
Publication number: 20230402091Abstract: Structures herein include an array of non-volatile memory cells. The non-volatile memory cells include memory bit cells and at least one reference bit cell that is adjacent the memory bit cells. These structures also include at least one reference voltage regulator connected to the reference bit cell, and at least one sense amplifier connected to the memory bit cells and the reference voltage regulator.Type: ApplicationFiled: June 14, 2022Publication date: December 14, 2023Inventors: Venkatesh P. Gopinath, Xiaoli Hu, Thomas Melde, Nicki N. Mika
-
Patent number: 11825663Abstract: A nonvolatile memory device is provided, the device comprising a ferroelectric memory capacitor arranged over a first active region contact of a first transistor and a gate contact of a second transistor, whereby the ferroelectric memory capacitor at least partially overlaps a gate of the first transistor.Type: GrantFiled: August 17, 2021Date of Patent: November 21, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Johannes Müller, Thomas Melde, Stefan Dünkel, Ralf Richter
-
Patent number: 11631772Abstract: A non-volatile memory (NVM) structure includes a first memory device including: a first inter-poly dielectric defined by an isolation layer over a first semiconductor layer over an insulator layer (SOI) stack over a bulk semiconductor substrate, a first tunneling insulator defined by the insulator layer, a first floating gate defined by the semiconductor layer of the SOI stack, and a first channel region defined in the bulk semiconductor substrate between a source region and a drain region. The memory device may also include a control gate over the SOI stack, an erase gate over a source region in the bulk substrate, and a bitline contact coupled to a drain region in the bulk substrate. The NVM structure may also include another memory device similar to the first memory device and sharing the source region.Type: GrantFiled: January 13, 2021Date of Patent: April 18, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Thomas Melde, Stefan Dünkel, Ralf Richter
-
Patent number: 11600628Abstract: Embodiments of the disclosure provide a floating gate memory cell, including: a silicon-on-insulator (SOI) substrate, the SOI substrate including a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate, and a semiconductor layer formed on the buried oxide layer; a memory device, including: a control gate formed in the semiconductor layer of the SOI substrate; an insulating layer formed on the control gate; and a floating gate formed on the insulating layer; and a transistor device electrically connected to the memory device. The transistor device includes an active region formed in the semiconductor layer of the SOI substrate.Type: GrantFiled: January 15, 2020Date of Patent: March 7, 2023Assignee: GLOBALFOUNDRIES U.S. Inc.Inventor: Thomas Melde
-
Publication number: 20230067884Abstract: A nonvolatile memory device is provided, the device comprising a ferroelectric memory capacitor arranged over a first active region contact of a first transistor and a gate contact of a second transistor, whereby the ferroelectric memory capacitor at least partially overlaps a gate of the first transistor.Type: ApplicationFiled: August 17, 2021Publication date: March 2, 2023Inventors: JOHANNES MÜLLER, THOMAS MELDE, STEFAN DÜNKEL, RALF RICHTER
-
Publication number: 20220223740Abstract: A non-volatile memory (NVM) structure includes a first memory device including: a first inter-poly dielectric defined by an isolation layer over a first semiconductor layer over an insulator layer (SOI) stack over a bulk semiconductor substrate, a first tunneling insulator defined by the insulator layer, a first floating gate defined by the semiconductor layer of the SOI stack, and a first channel region defined in the bulk semiconductor substrate between a source region and a drain region. The memory device may also include a control gate over the SOI stack, an erase gate over a source region in the bulk substrate, and a bitline contact coupled to a drain region in the bulk substrate. The NVM structure may also include another memory device similar to the first memory device and sharing the source region.Type: ApplicationFiled: January 13, 2021Publication date: July 14, 2022Inventors: Thomas Melde, Stefan Dünkel, Ralf Richter
-
Publication number: 20210217758Abstract: Embodiments of the disclosure provide a floating gate memory cell, including: a silicon-on-insulator (SOI) substrate, the SOI substrate including a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate, and a semiconductor layer formed on the buried oxide layer; a memory device, including: a control gate formed in the semiconductor layer of the SOI substrate; an insulating layer formed on the control gate; and a floating gate formed on the insulating layer; and a transistor device electrically connected to the memory device. The transistor device includes an active region formed in the semiconductor layer of the SOI substrate.Type: ApplicationFiled: January 15, 2020Publication date: July 15, 2021Inventor: Thomas Melde
-
Patent number: 10079242Abstract: Methods of forming a device structure for a field-effect transistor and device structures for a field-effect transistor. A first gate dielectric layer is formed on a semiconductor layer in a first area. A hardmask layer is formed on the first gate dielectric layer in the first area of the semiconductor layer. A gate stack layer is formed on the semiconductor layer in a second area and on the hardmask layer in the first area of the semiconductor layer. The hardmask layer separates the gate stack layer from the first gate dielectric layer on the first area of the semiconductor layer.Type: GrantFiled: December 1, 2016Date of Patent: September 18, 2018Assignee: GLOBALFOUNDRIES Inc.Inventors: Ralf Richter, Thomas Melde, Elke Erben
-
Publication number: 20180158835Abstract: Methods of forming a device structure for a field-effect transistor and device structures for a field-effect transistor. A first gate dielectric layer is formed on a semiconductor layer in a first area. A hardmask layer is formed on the first gate dielectric layer in the first area of the semiconductor layer. A gate stack layer is formed on the semiconductor layer in a second area and on the hardmask layer in the first area of the semiconductor layer. The hardmask layer separates the gate stack layer from the first gate dielectric layer on the first area of the semiconductor layer.Type: ApplicationFiled: December 1, 2016Publication date: June 7, 2018Inventors: Ralf Richter, Thomas Melde, Elke Erben
-
Patent number: 9898572Abstract: A method of Back-End-Of-Line processing of a semiconductor device is provided including providing a layout for metal lines of a metallization layer of the semiconductor device, determining a semi-isolated metal line in the provided layout and shifting at least a portion of the determined semi-isolated metal line.Type: GrantFiled: February 17, 2016Date of Patent: February 20, 2018Assignee: GLOBALFOUNDRIES Inc.Inventors: Thomas Melde, Matthias U. Lehr, Thomas Herrmann, Jens Hassmann, Moritz Andreas Meyer, Rakesh Kumar Kuncha
-
Patent number: 9842845Abstract: The present disclosure provides a semiconductor device structure including a non-volatile memory (NVM) device structure in and above a first region of a semiconductor substrate and a logic device formed in and above a second region of the semiconductor substrate different from the first region. The NVM device structure includes a floating-gate, a first select gate and at least one control gate. The logic device includes a logic gate disposed on the second region and source/drain regions provided in the second region adjacent to the logic gate. The control gate extends over the floating-gate and the first select gate is laterally separated from the floating-gate by an insulating material layer portion. Upon forming the semiconductor device structure, the floating gate is formed before forming the control gate and the logic device.Type: GrantFiled: October 28, 2016Date of Patent: December 12, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Thomas Melde, Ralf Richter
-
Publication number: 20170345834Abstract: A method of manufacturing a semiconductor device is provided including providing a silicon-on-insulator substrate comprising a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate and a semiconductor layer formed on the buried oxide layer, and forming a memory device on the SOI substrate including forming a floating gate from a part of the semiconductor layer, forming an insulating layer on the floating gate, and forming a control gate on the insulating layer.Type: ApplicationFiled: May 25, 2016Publication date: November 30, 2017Inventor: Thomas Melde
-
Publication number: 20170235867Abstract: A method of Back-End-Of-Line processing of a semiconductor device is provided including providing a layout for metal lines of a metallization layer of the semiconductor device, determining a semi-isolated metal line in the provided layout and shifting at least a portion of the determined semi-isolated metal line.Type: ApplicationFiled: February 17, 2016Publication date: August 17, 2017Inventors: Thomas Melde, Matthias U. Lehr, Thomas Herrmann, Jens Hassmann, Moritz Andreas Meyer, Rakesh Kumar Kuncha
-
Patent number: 8258564Abstract: An integrated circuit is described. The integrated circuit may comprise a multitude of floating-gate electrodes, wherein at least one of the floating-gate electrodes has a lower width and an upper width, the lower width being larger than the upper width, and wherein the at least one of the floating-gate electrodes comprises a transition metal. A corresponding manufacturing method for an integrated circuit is also described.Type: GrantFiled: April 17, 2008Date of Patent: September 4, 2012Assignee: Qimonda AGInventors: Josef Willer, Franz Hofmann, Michael Specht, Christoph Friederich, Doris Keitel-Schulz, Lars Bach, Thomas Melde
-
Publication number: 20090261397Abstract: An integrated circuit is described. The integrated circuit may comprise a multitude of floating-gate electrodes, wherein at least one of the floating-gate electrodes has a lower width and an upper width, the lower width being larger than the upper width, and wherein the at least one of the floating-gate electrodes comprises a transition metal. A corresponding manufacturing method for an integrated circuit is also described.Type: ApplicationFiled: April 17, 2008Publication date: October 22, 2009Applicants: QIMONDA FLASH GMBH, QIMONDA AGInventors: Josef Willer, Franz Hofmann, Michael Specht, Christoph Friederich, Doris Keitel-Schulz, Lars Bach, Thomas Melde