Patents by Inventor Thomas Melde

Thomas Melde has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12557330
    Abstract: Disclosed are embodiments of a semiconductor device and method of forming the device. The device includes a gate with first and second sections on a semiconductor layer. The first section includes first gate dielectric and gate conductor layers and an optional additional gate conductor layer on the first gate conductor layer. The second section includes second gate dielectric and gate conductor layers on the semiconductor layer and further extending onto the top of the first gate conductor layer. The second gate dielectric layer is thinner than the first gate dielectric layer. A gate sidewall spacer is on the first gate conductor layer positioned laterally to a sidewall of the second section (e.g., between the sidewall and the optional additional gate conductor layer). The first and second sections are either electrically connected for biasing with the gate bias voltage or electrically isolated for biasing with different gate bias voltages.
    Type: Grant
    Filed: March 28, 2023
    Date of Patent: February 17, 2026
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Thomas Melde, Ralf Richter, Stefan Dünkel
  • Publication number: 20250133735
    Abstract: A non-volatile memory structure includes a semiconductor substrate and first and second memory devices on the semiconductor substrate. Each of the first and second memory devices includes a floating gate, a tunnelling insulator under the floating gate, an isolation layer over the floating gate, and at least one of a select gate and a control gate over the isolation layer. The non-volatile memory structure further includes an erase gate shared by the first and second memory devices, a source region under the erase gate, and a shallow trench isolation structure between the erase gate and the source region. The shallow trench isolation structure increases the number of write/erase cycles that can be performed by the non-volatile memory structure.
    Type: Application
    Filed: October 18, 2023
    Publication date: April 24, 2025
    Inventors: Nicki Nico MIKA, Tom Herrmann, Thomas Melde
  • Patent number: 12205633
    Abstract: Structures herein include an array of non-volatile memory cells. The non-volatile memory cells include memory bit cells and at least one reference bit cell that is adjacent the memory bit cells. These structures also include at least one reference voltage regulator connected to the reference bit cell, and at least one sense amplifier connected to the memory bit cells and the reference voltage regulator.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: January 21, 2025
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Venkatesh P. Gopinath, Xiaoli Hu, Thomas Melde, Nicki N. Mika
  • Publication number: 20240332417
    Abstract: Disclosed are embodiments of a semiconductor device and method of forming the device. The device includes a gate with first and second sections on a semiconductor layer. The first section includes first gate dielectric and gate conductor layers and an optional additional gate conductor layer on the first gate conductor layer. The second section includes second gate dielectric and gate conductor layers on the semiconductor layer and further extending onto the top of the first gate conductor layer. The second gate dielectric layer is thinner than the first gate dielectric layer. A gate sidewall spacer is on the first gate conductor layer positioned laterally to a sidewall of the second section (e.g., between the sidewall and the optional additional gate conductor layer). The first and second sections are either electrically connected for biasing with the gate bias voltage or electrically isolated for biasing with different gate bias voltages.
    Type: Application
    Filed: March 28, 2023
    Publication date: October 3, 2024
    Inventors: Thomas Melde, Ralf Richter, Stefan Dünkel
  • Publication number: 20230402091
    Abstract: Structures herein include an array of non-volatile memory cells. The non-volatile memory cells include memory bit cells and at least one reference bit cell that is adjacent the memory bit cells. These structures also include at least one reference voltage regulator connected to the reference bit cell, and at least one sense amplifier connected to the memory bit cells and the reference voltage regulator.
    Type: Application
    Filed: June 14, 2022
    Publication date: December 14, 2023
    Inventors: Venkatesh P. Gopinath, Xiaoli Hu, Thomas Melde, Nicki N. Mika
  • Patent number: 11825663
    Abstract: A nonvolatile memory device is provided, the device comprising a ferroelectric memory capacitor arranged over a first active region contact of a first transistor and a gate contact of a second transistor, whereby the ferroelectric memory capacitor at least partially overlaps a gate of the first transistor.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: November 21, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Johannes Müller, Thomas Melde, Stefan Dünkel, Ralf Richter
  • Patent number: 11631772
    Abstract: A non-volatile memory (NVM) structure includes a first memory device including: a first inter-poly dielectric defined by an isolation layer over a first semiconductor layer over an insulator layer (SOI) stack over a bulk semiconductor substrate, a first tunneling insulator defined by the insulator layer, a first floating gate defined by the semiconductor layer of the SOI stack, and a first channel region defined in the bulk semiconductor substrate between a source region and a drain region. The memory device may also include a control gate over the SOI stack, an erase gate over a source region in the bulk substrate, and a bitline contact coupled to a drain region in the bulk substrate. The NVM structure may also include another memory device similar to the first memory device and sharing the source region.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: April 18, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Thomas Melde, Stefan Dünkel, Ralf Richter
  • Patent number: 11600628
    Abstract: Embodiments of the disclosure provide a floating gate memory cell, including: a silicon-on-insulator (SOI) substrate, the SOI substrate including a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate, and a semiconductor layer formed on the buried oxide layer; a memory device, including: a control gate formed in the semiconductor layer of the SOI substrate; an insulating layer formed on the control gate; and a floating gate formed on the insulating layer; and a transistor device electrically connected to the memory device. The transistor device includes an active region formed in the semiconductor layer of the SOI substrate.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: March 7, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventor: Thomas Melde
  • Publication number: 20230067884
    Abstract: A nonvolatile memory device is provided, the device comprising a ferroelectric memory capacitor arranged over a first active region contact of a first transistor and a gate contact of a second transistor, whereby the ferroelectric memory capacitor at least partially overlaps a gate of the first transistor.
    Type: Application
    Filed: August 17, 2021
    Publication date: March 2, 2023
    Inventors: JOHANNES MÜLLER, THOMAS MELDE, STEFAN DÜNKEL, RALF RICHTER
  • Publication number: 20220223740
    Abstract: A non-volatile memory (NVM) structure includes a first memory device including: a first inter-poly dielectric defined by an isolation layer over a first semiconductor layer over an insulator layer (SOI) stack over a bulk semiconductor substrate, a first tunneling insulator defined by the insulator layer, a first floating gate defined by the semiconductor layer of the SOI stack, and a first channel region defined in the bulk semiconductor substrate between a source region and a drain region. The memory device may also include a control gate over the SOI stack, an erase gate over a source region in the bulk substrate, and a bitline contact coupled to a drain region in the bulk substrate. The NVM structure may also include another memory device similar to the first memory device and sharing the source region.
    Type: Application
    Filed: January 13, 2021
    Publication date: July 14, 2022
    Inventors: Thomas Melde, Stefan Dünkel, Ralf Richter
  • Publication number: 20210217758
    Abstract: Embodiments of the disclosure provide a floating gate memory cell, including: a silicon-on-insulator (SOI) substrate, the SOI substrate including a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate, and a semiconductor layer formed on the buried oxide layer; a memory device, including: a control gate formed in the semiconductor layer of the SOI substrate; an insulating layer formed on the control gate; and a floating gate formed on the insulating layer; and a transistor device electrically connected to the memory device. The transistor device includes an active region formed in the semiconductor layer of the SOI substrate.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 15, 2021
    Inventor: Thomas Melde
  • Patent number: 10079242
    Abstract: Methods of forming a device structure for a field-effect transistor and device structures for a field-effect transistor. A first gate dielectric layer is formed on a semiconductor layer in a first area. A hardmask layer is formed on the first gate dielectric layer in the first area of the semiconductor layer. A gate stack layer is formed on the semiconductor layer in a second area and on the hardmask layer in the first area of the semiconductor layer. The hardmask layer separates the gate stack layer from the first gate dielectric layer on the first area of the semiconductor layer.
    Type: Grant
    Filed: December 1, 2016
    Date of Patent: September 18, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ralf Richter, Thomas Melde, Elke Erben
  • Publication number: 20180158835
    Abstract: Methods of forming a device structure for a field-effect transistor and device structures for a field-effect transistor. A first gate dielectric layer is formed on a semiconductor layer in a first area. A hardmask layer is formed on the first gate dielectric layer in the first area of the semiconductor layer. A gate stack layer is formed on the semiconductor layer in a second area and on the hardmask layer in the first area of the semiconductor layer. The hardmask layer separates the gate stack layer from the first gate dielectric layer on the first area of the semiconductor layer.
    Type: Application
    Filed: December 1, 2016
    Publication date: June 7, 2018
    Inventors: Ralf Richter, Thomas Melde, Elke Erben
  • Patent number: 9898572
    Abstract: A method of Back-End-Of-Line processing of a semiconductor device is provided including providing a layout for metal lines of a metallization layer of the semiconductor device, determining a semi-isolated metal line in the provided layout and shifting at least a portion of the determined semi-isolated metal line.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: February 20, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Thomas Melde, Matthias U. Lehr, Thomas Herrmann, Jens Hassmann, Moritz Andreas Meyer, Rakesh Kumar Kuncha
  • Patent number: 9842845
    Abstract: The present disclosure provides a semiconductor device structure including a non-volatile memory (NVM) device structure in and above a first region of a semiconductor substrate and a logic device formed in and above a second region of the semiconductor substrate different from the first region. The NVM device structure includes a floating-gate, a first select gate and at least one control gate. The logic device includes a logic gate disposed on the second region and source/drain regions provided in the second region adjacent to the logic gate. The control gate extends over the floating-gate and the first select gate is laterally separated from the floating-gate by an insulating material layer portion. Upon forming the semiconductor device structure, the floating gate is formed before forming the control gate and the logic device.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: December 12, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Thomas Melde, Ralf Richter
  • Publication number: 20170345834
    Abstract: A method of manufacturing a semiconductor device is provided including providing a silicon-on-insulator substrate comprising a semiconductor bulk substrate, a buried oxide layer formed on the semiconductor bulk substrate and a semiconductor layer formed on the buried oxide layer, and forming a memory device on the SOI substrate including forming a floating gate from a part of the semiconductor layer, forming an insulating layer on the floating gate, and forming a control gate on the insulating layer.
    Type: Application
    Filed: May 25, 2016
    Publication date: November 30, 2017
    Inventor: Thomas Melde
  • Publication number: 20170235867
    Abstract: A method of Back-End-Of-Line processing of a semiconductor device is provided including providing a layout for metal lines of a metallization layer of the semiconductor device, determining a semi-isolated metal line in the provided layout and shifting at least a portion of the determined semi-isolated metal line.
    Type: Application
    Filed: February 17, 2016
    Publication date: August 17, 2017
    Inventors: Thomas Melde, Matthias U. Lehr, Thomas Herrmann, Jens Hassmann, Moritz Andreas Meyer, Rakesh Kumar Kuncha
  • Patent number: 8258564
    Abstract: An integrated circuit is described. The integrated circuit may comprise a multitude of floating-gate electrodes, wherein at least one of the floating-gate electrodes has a lower width and an upper width, the lower width being larger than the upper width, and wherein the at least one of the floating-gate electrodes comprises a transition metal. A corresponding manufacturing method for an integrated circuit is also described.
    Type: Grant
    Filed: April 17, 2008
    Date of Patent: September 4, 2012
    Assignee: Qimonda AG
    Inventors: Josef Willer, Franz Hofmann, Michael Specht, Christoph Friederich, Doris Keitel-Schulz, Lars Bach, Thomas Melde
  • Publication number: 20090261397
    Abstract: An integrated circuit is described. The integrated circuit may comprise a multitude of floating-gate electrodes, wherein at least one of the floating-gate electrodes has a lower width and an upper width, the lower width being larger than the upper width, and wherein the at least one of the floating-gate electrodes comprises a transition metal. A corresponding manufacturing method for an integrated circuit is also described.
    Type: Application
    Filed: April 17, 2008
    Publication date: October 22, 2009
    Applicants: QIMONDA FLASH GMBH, QIMONDA AG
    Inventors: Josef Willer, Franz Hofmann, Michael Specht, Christoph Friederich, Doris Keitel-Schulz, Lars Bach, Thomas Melde