Patents by Inventor Thomas Michael Laskowski

Thomas Michael Laskowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing an electrostatic chuck
    Patent number: 6986865
    Abstract: A method for manufacturing an electrostatic chuck is disclosed wherein a sintered ceramic body having a dielectric layer made from Alumina (Al2O2) and Titanium Nitride (TiN) having a specific range of particle size is heat treated in an oxygen-rich environment in order to produce a uniform dielectric layer having no pores or micro-cracks.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: January 17, 2006
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Hongy Lin, Jason Eugene Smith, Thomas Michael Laskowski
  • Method for manufacturing an electrostatic chuck
    Publication number: 20040007800
    Abstract: A method for manufacturing an electrostatic chuck is disclosed wherein a sintered ceramic body having a dielectric layer made from Alumina (Al2O2) and Titanium Nitride (TiN) having a specific range of particle size is heat treated in an oxygen-rich environment in order to produce a uniform dielectric layer having no pores or micro-cracks.
    Type: Application
    Filed: July 10, 2002
    Publication date: January 15, 2004
    Inventors: Hongy Lin, Jason Eugene Smith, Thomas Michael Laskowski