Patents by Inventor Thomas Mieth

Thomas Mieth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Holder for semiconductor wafers in a brush-cleaning installation
    Patent number: 6804851
    Abstract: A holder in a brush-cleaning installation, preferably for combined use in the brush-cleaning and centrifugal-drying process, contains a carrier part from which there extend, in a spider-shaped manner, a plurality of carrying arms. On the carrying arms there is mounted, in a rotatable manner in each case, a guide roller which, in addition to positioning the semiconductor wafer vertically, also makes it possible for the semiconductor wafer to be positioned horizontally with the aid of an annular collar on a bottom section of the guide roller.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: October 19, 2004
    Assignee: Infineon Technologies AG
    Inventors: Matthias Fehr, Rüdiger Hunger, Thomas Mieth
  • Holder for semiconductor wafers in a brush-cleaning installation
    Publication number: 20020160701
    Abstract: A holder in a brush-cleaning installation, preferably for combined use in the brush-cleaning and centrifugal-drying process, contains a carrier part from which there extend, in a spider-shaped manner, a plurality of carrying arms. On the carrying arms there is mounted, in a rotatable manner in each case, a guide roller which, in addition to positioning the semiconductor wafer vertically, also makes it possible for the semiconductor wafer to be positioned horizontally with the aid of an annular collar on a bottom section of the guide roller.
    Type: Application
    Filed: April 29, 2002
    Publication date: October 31, 2002
    Inventors: Matthias Fehr, Rudiger Hunger, Thomas Mieth