Patents by Inventor Thomas Mussenbrock

Thomas Mussenbrock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma
    Patent number: 9113543
    Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: August 18, 2015
    Assignee: RUHR-UNIVERSITÄT BOCHUM
    Inventors: Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz
  • Method for controlling ion energy in radio frequency plasmas
    Patent number: 8933629
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: January 13, 2015
    Assignee: Ruhr-Universität Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
    Publication number: 20140103808
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Application
    Filed: November 8, 2013
    Publication date: April 17, 2014
    Applicant: Ruhr-Universitat Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • Method for controlling ion energy in radio frequency plasmas
    Patent number: 8643280
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: February 4, 2014
    Assignee: Ruhr-Universität Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA
    Publication number: 20130160523
    Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.
    Type: Application
    Filed: October 6, 2011
    Publication date: June 27, 2013
    Applicant: RUHR-UNIVERSITÄT BOCHUM
    Inventors: Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz
  • METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
    Publication number: 20110248634
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Application
    Filed: July 11, 2008
    Publication date: October 13, 2011
    Applicant: RUHR-UNIVERSITAT
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock