Patents by Inventor Thomas N. Fogarty

Thomas N. Fogarty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of patterned silicon nitride insulating layers having gently sloping sidewalls
    Patent number: 4181564
    Abstract: A method of forming patterned insulating layers such as silicon nitride for use in integrated circuit fabrication is disclosed. The insulating layer is formed by reactive plasma deposition while the temperature of the substrate is decreased. This diminishing temperature affects the etching characteristics of the layer such that when openings are formed by a selective plasma etching, the sidewalls will be sloped at an acute angle with the substrate even when the layer is overetched.
    Type: Grant
    Filed: April 24, 1978
    Date of Patent: January 1, 1980
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: Thomas N. Fogarty, William R. Harshbarger, Roy A. Porter