Patents by Inventor Thomas Nunan

Thomas Nunan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single crystal silicon sensor with additional layer and method of producing the same
    Publication number: 20060214248
    Abstract: A SOI-based MEMS device has a base layer, a device layer, and an insulator layer between the base layer and the device layer. The device also has a deposited layer having a portion that is spaced from the device layer. The device layer is between the insulator layer and the deposited layer.
    Type: Application
    Filed: June 2, 2006
    Publication date: September 28, 2006
    Inventors: Thomas Nunan, Timothy Brosnihan
  • Method of forming a MEMS device
    Publication number: 20060148133
    Abstract: A method of forming a MEMS device first releases structure, relative to a substrate, to form a space between the structure and the substrate. The process then adds material to the space between the structure and the substrate to substantially stabilize the structure relative to the substrate. Then, at some subsequent point, the method removes at least a portion of the material from the space to re-release the structure.
    Type: Application
    Filed: January 3, 2005
    Publication date: July 6, 2006
    Inventors: Thomas Nunan, Timothy Brosnihan
  • Single crystal silicon sensor with additional layer and method of producing the same
    Publication number: 20050196933
    Abstract: A SOI-based MEMS device has a base layer, a device layer, and an insulator layer between the base layer and the device layer. The device also has a deposited layer having a portion that is spaced from the device layer. The device layer is between the insulator layer and the deposited layer.
    Type: Application
    Filed: March 2, 2004
    Publication date: September 8, 2005
    Inventors: Thomas Nunan, Timothy Brosnihan