Abstract: A method and apparatus for managing recipes in a semiconductor manufacturing process. Recipes and associated process contexts in a manufacturing execution system and corresponding recipes and associated contexts in a recipe management system are audited to identify discrepancies. The discrepancies are reconciled to ensure that compatible recipes and process contexts are maintained in the manufacturing execution system and the recipe management system. The audit and reconciliation process can be initiated automatically at predetermined time intervals or can be initiated interactively by a user of the manufacturing system.

Abstract: A method for managing recipes in a semiconductor manufacturing process which includes resolving a recipe to provide a resolved recipe using a configuration for a current context and rendering the recipe to provide a rendered recipe. The rendered recipe corresponds to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.

Abstract: A method for tracking products within a sequence of processes. The products are moved in carriers through the sequence and the products are initially arranged in groups. The products may be moved between different carriers during the sequence. The method includes the steps of: (a) assigning a first set of identification numbers to the products, a second set of identification numbers to the groups, and a third set of identification numbers to the carriers; and (b) tracking the movement of products through the sequence using the second set of identification numbers, tracking the movement of carriers using the third set of identification numbers, and synchronizing the movement of the products and the carriers.

Abstract: A method and associated apparatus within a storage library subsystem for simply adapting the motion of a robotic mechanism for moving media cartridges to allow for mechanical misalignments. When retracting a cartridge from a slot in the library subsystem, the present invention monitors a sensor in the gripper hand to verify that the cartridge is not being pulled from the gripper due to "snagging" caused by mechanical misalignment of the had with the slot. When a snag is sensed, the methods and apparatus of the present invention stop the motion, initiate robotic actions to regroup the cartridge securely, and retry the retraction with adjustments to the robotic movements and positions to avoid the snag. When inserting a cartridge into a slot in the library subsystem, the present invention monitors the progress of the servo motor controlling the robot to determine whether the motion is blocked due to mechanical misalignment of the robotic mechanism with the slot.

Abstract: A device is disclosed for charging and/or reading a capacitor associated with an electrometer incorporated in a radiation dosimeter for the purpose of initializing or "zeroing", the dosimeter at the commencement of a radiation measurement cycle or reading it at any time thereafter. The dosimeter electrometer has a movable electrode the position of which is indicative of the charge remaining on the dosimeter capacitor and in turn the amount of radiation incident on the dosimeter since it was zeroed. The charging device also includes means for discharging, immediately upon conclusion of the dosimeter capacitor charging operation, stray capacitance inherent in the dosimeter by reason of its mechanical construction. The charge on the stray capacitance, if not discharged at the conclusion of the dosimeter capacitor charging operation, leaks off during the measurement cycle, introducing measurement errors.