Patents by Inventor Thomas Prolier

Thomas Prolier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ATOMIC LAYER DEPOSITION OF SUPER-CONDUCTING NIOBIUM SILICIDE
    Publication number: 20120219824
    Abstract: A method of preparing a superconducting thin film of niobium silicide using atomic layer deposition (ALD) where the superconducting critical temperature of the film is controllable by modulating the thickness of the thin film. The film is formed by exposing a substrate within an ALD reactor to alternating exposures of a niobium halide (NbQx) and a reducing precursor, for example, disilane (Si2H6) or silane (SiH4). A number of ALD cycles are performed to obtain the film thickness and establish the desired superconducting critical temperature between 0.4 K and 3.1 K.
    Type: Application
    Filed: February 28, 2011
    Publication date: August 30, 2012
    Inventors: Thomas Prolier, Jeffrey Elam, Jeffrey Klug, Michael J. Pellin