Abstract: A method for forming of a thin film on a substrate is disclosed. The method includes cleaning a process chamber by flowing a first gas having fluorine. The method also includes coating the process chamber with a first encapsulating layer including amorphous silicon (A-Si) by flowing a second gas for a first duration, where the first encapsulating layer protects against fluorine contamination. The method further includes loading a substrate into the process chamber, depositing a thin film on the substrate by flowing a third gas into the process chamber and unloading the substrate from the process chamber. The thin film can include silicon nitride (SiN), the first gas can include nitrogen triflouride (NF3) gas and second gas can include silane (SiH4) gas. The thin film can be formed using plasma-enhanced chemical vapor deposition. The substrate can be a solar cell or a liquid crystal display (LCD).

Abstract: A vacuum breaking device includes a housing, a sealing base, a floating cup and a sealing ring. The housing has a liquid inlet, a liquid outlet and an air passageway. The sealing base is installed in the air passageway, and the floating cup is installed in an inner chamber of the sealing base. The sealing ring is fitted around an upper end of the floating cup for properly sealing the outer-air inlet in the upper portion of the sealing base and communicating with the inner chamber. The floating cup has an annular flange for increasing the buoyancy of the floating cup, so that the outer-air inlet may be quickly sealed up. The annular flange has plural air paths, so the vacuum condition may be broken immediately when a vacuum pressure is produced in the device.

Abstract: A vacuum breaking device includes a housing, a sealing base, a floating cup and a sealing ring. The housing has a liquid inlet, a liquid outlet and an air passageway. The sealing base is installed in the air passageway, and the floating cup is installed in an inner chamber of the sealing base. The sealing ring is fitted around an upper end of the floating cup for properly sealing the outer-air inlet in the upper portion of the sealing base and communicating with the inner chamber. The floating cup has an annular flange for increasing the buoyancy of the floating cup, so that the outer-air inlet may be quickly sealed up. The annular flange has plural air paths, so the vacuum condition may be broken immediately when a vacuum pressure is produced in the device.