Patents by Inventor Thomas R. Dietrich

Thomas R. Dietrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor head for use in atomic force microscopy and method for its production
    Patent number: 5465611
    Abstract: A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.
    Type: Grant
    Filed: March 30, 1994
    Date of Patent: November 14, 1995
    Assignee: IMM Institut Fur Mikrotechnik GmbH
    Inventors: Alexander Ruf, Michael Abraham, Manfred Lacher, Thomas Zetterer, Thomas R. Dietrich