Patents by Inventor Thomas R. Gockel

Thomas R. Gockel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lens mount integrated with a thermoelectrically cooled photodetector module
    Patent number: 7009173
    Abstract: An integrated housing for a lens and a photodetector, which is being cooled to low temperatures to enable the detector to detect faint emission of photons. An enclosure is provided to which a lens is affixed from one side using a retaining ring, and a photodetector is affixed from the opposite side. The enclosure is affixed to a TE cooler. The enclosure and the retaining ring are made from materials having similar thermal expansion coefficients.
    Type: Grant
    Filed: June 22, 2004
    Date of Patent: March 7, 2006
    Assignee: Credence Systems Corporation
    Inventors: Radu Ispasoiu, Thomas R. Gockel, James S. Vickers
  • Brush box containment apparatus
    Patent number: 6272712
    Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
    Type: Grant
    Filed: July 7, 2000
    Date of Patent: August 14, 2001
    Assignee: Lam Research Corporation
    Inventors: Thomas R. Gockel, Lorin Olson, Lynn Ryle, Brett A. Whitelaw, Michael Ravkin
  • Cleaning/buffer apparatus for use in a wafer processing device
    Patent number: 6200201
    Abstract: A semiconductor processing system, such as a system for buffing or scrubbing both sides of a wafer at the same time, that includes a processing box for use with chemical solutions, a positioning device to position a semiconductor substrate, or other similar semiconductor material or device, and a placement device to place a buffing pad or scrubbing brush.
    Type: Grant
    Filed: January 20, 1998
    Date of Patent: March 13, 2001
    Assignee: Lam Research Corporation
    Inventors: Mikhael Ravkin, John M. deLarios, Xiuhua Zhang, Thomas R. Gockel
  • Brush assembly apparatus
    Patent number: 6119295
    Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
    Type: Grant
    Filed: April 2, 1999
    Date of Patent: September 19, 2000
    Assignee: Lam Research Corporation
    Inventors: Thomas R. Gockel, Lorin Olson, Lynn Ryle, Brett A. Whitelaw
  • Brush assembly apparatus
    Patent number: 5924154
    Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
    Type: Grant
    Filed: August 29, 1996
    Date of Patent: July 20, 1999
    Assignee: Ontrak Systems, Inc.
    Inventors: Thomas R. Gockel, Lorin Olson, Lynn Ryle, Brett A. Whitelaw, Michael Ravkin
  • Roller positioning apparatus
    Patent number: 5809832
    Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
    Type: Grant
    Filed: August 29, 1996
    Date of Patent: September 22, 1998
    Assignee: Ontrak Systems, Inc.
    Inventors: Thomas R. Gockel, Lorin Olson, Lynn Ryle, Brett A. Whitelaw
  • Containment apparatus
    Patent number: 5794299
    Abstract: A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
    Type: Grant
    Filed: August 29, 1996
    Date of Patent: August 18, 1998
    Assignee: Ontrak Systems, Inc.
    Inventors: Thomas R. Gockel, Lorin Olson, Lynn Ryle, Brett A. Whitelaw