Patents by Inventor Thomas S. Frederick

Thomas S. Frederick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring a patterned transfer process using line width metrology
    Patent number: 6225639
    Abstract: A patterned transfer process in the manufacture of a semiconductor device is monitored. Patterned features formed on a semiconductor layer to be etched are scanned for generating a first amplitude modulated waveform intensity signal. The first amplitude modulated waveform intensity signal is sampled to extract a first measurement population of critical dimension measurements. The patterned features are etched and then scanned for generating a second amplitude modulated waveform intensity signal. The second amplitude modulated waveform intensity signal is then sampled to extract a second measurement population of critical dimension measurements, which are then cross-correlated to obtain correlation values of the etching process.
    Type: Grant
    Filed: August 27, 1999
    Date of Patent: May 1, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventors: Thomas E. Adams, Thomas S. Frederick, Scott Jessen, John M. McIntosh, Catherine Vartuli